Acta Optica Sinica, Volume. 44, Issue 8, 0826001(2024)

Measurement Method of Aspherical Synchronous Annular Subaperture Interferometry

Yuan Su, Ailing Tian*, Hongjun Wang, Bingcai Liu, Xueliang Zhu, Siqi Wang, Kexin Ren, and Yuwen Zhang
Author Affiliations
  • Shaanxi Province Key Laboratory of Thin Films Technology and Optical Test, School of Opto-electronical Engineering, Xi’an Technological University, Xi’an 710021, Shaanxi , China
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    Figures & Tables(12)
    Schematic of SASI method to detect aspherical surface
    Lightpath diagram of aspherical surface test using SASI method
    Lightpath model of aspheric test using SASI method
    Simulated interferograms and changing rate curves of OPD. (a) Simulated interferogram by interferometer; (b) changing rate of OPD measured by interferometer; (c) simulated interferogram by SASI method; (d) changing rate of OPD measured by SASI method
    Measurement data before and after unifying the reference standard. (a) Before unifying the reference standard; (b) after unifying the reference standard
    Actual surface error and aspherical surface error and residual measured by SASI method. (a) Actual surface error; (b) surface error measured by SASI method; (c) surface residual by SASI method
    Schematic of actual measuring system
    Collected interferograms in the experiment. (a) Aspherical surface measuring by interferometer; (b) aspherical surface measuring by SASI method
    Testing results of aspheric surface. (a) Testing result by SASI method; (b) testing result by Luphoshcan method; (c) residual between test results of SASI and Luphoscan methods
    • Table 1. Distance between two focuses of bifocal lens and corresponding detection area parameters

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      Table 1. Distance between two focuses of bifocal lens and corresponding detection area parameters

      Parameterl /mmG1(x, y)G2(x, y)R1 /mmR2 /mm
      Value0.8(1.9, 30.7)(3.2, 40.0)251.9252.7
    • Table 2. Bifocal lens design parameters and corresponding detection area parameters

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      Table 2. Bifocal lens design parameters and corresponding detection area parameters

      ParameterWavelength /nml /mmGlassG1(x, y)G2(x, y)
      Value632.80.7F_SILICA(1.7, 32.6)(3.7, 48.3)
    • Table 3. Results of SASI and Luphoshcan methods and the PV and RMS values of surface error

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      Table 3. Results of SASI and Luphoshcan methods and the PV and RMS values of surface error

      ParameterPV /λRMS /λ
      Surface by SASI0.62370.0333
      Surface by Luphoshcan0.58750.0424
      Absolute surface error0.03620.0091
      Residual surface error0.09260.0098
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    Yuan Su, Ailing Tian, Hongjun Wang, Bingcai Liu, Xueliang Zhu, Siqi Wang, Kexin Ren, Yuwen Zhang. Measurement Method of Aspherical Synchronous Annular Subaperture Interferometry[J]. Acta Optica Sinica, 2024, 44(8): 0826001

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    Paper Information

    Category: Physical Optics

    Received: Dec. 8, 2023

    Accepted: Jan. 30, 2024

    Published Online: Apr. 18, 2024

    The Author Email: Tian Ailing (ailintian@xatu.edu.cn)

    DOI:10.3788/AOS231903

    CSTR:32393.14.AOS231903

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