Optoelectronic Technology, Volume. 42, Issue 2, 129(2022)

Study on Developing Process of Large‑size Mask

Huachao ZHANG, Xiang GE, and Qilong XIONG
Author Affiliations
  • Hefei Qingyi Photomask Limited Company,Hefei 230011,CHN
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    Huachao ZHANG, Xiang GE, Qilong XIONG. Study on Developing Process of Large‑size Mask[J]. Optoelectronic Technology, 2022, 42(2): 129

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    Paper Information

    Category: Research and Trial-manufacture

    Received: Dec. 28, 2021

    Accepted: --

    Published Online: Jul. 29, 2022

    The Author Email:

    DOI:10.19453/j.cnki.1005-488x.2022.02.009

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