Acta Optica Sinica, Volume. 29, Issue 11, 3057(2009)
Research on High-Precision Acquisitive Method of Surface Coordinate Information Based on Parallel Confocal Microscopy
[3] [3] H.J.Tiziani,H.M.Uhde.Three-dimensional analysis by a microlens-array confocal arrangement [J].Appl.Opt.,1994,33(4):567-572
[4] [4] W.J.Tian,J.W.Yang et al..New method for measuring the properties of optical systems with microoptic components [C].SPIE,1996,2899:263-268
[5] [5] M.Ishihara,H.Sasaki.High-speed surface measurement using a nonscanning multiple-beam confocal microscope [J].Opt.Eng.,1999,38(6):1035-1040
[10] [10] Wang Yonghong,Yu Xiaofen,Yu Jianwei et al..A survey of the non-scanning 3-D profile confocal detecting [J ].Chinese Journal of Scientific Instrument,2003,24(4):8-11
[11] [11] Yu Daoyin,Tan Hengying.Engineering Optics [M].Beijing:China Machine Press,1999.108-109
[12] [12] Fei Yetai.Error Theory and Data Processing [M].Beijing:China Machine Press,2000.10-21
[13] [13] Yin Zheming,Ding Chunli.Proficient in MATLAB 6 [M].Beijing:Tsinghua University Press,2002.198-200
[14] [14] Ge Zhexue.Proficient in MATLAB [M].Beijing:Tsinghua University Press,2008.109-111
Get Citation
Copy Citation Text
Yu Qing, Yu Xiaofen, Bi Meihua. Research on High-Precision Acquisitive Method of Surface Coordinate Information Based on Parallel Confocal Microscopy[J]. Acta Optica Sinica, 2009, 29(11): 3057
Category: Instrumentation, Measurement and Metrology
Received: Dec. 11, 2008
Accepted: --
Published Online: Nov. 16, 2009
The Author Email: Qing Yu (jorson.y@163.com)