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Acta Optica Sinica, Volume. 29, Issue 11, 3057(2009)

Research on High-Precision Acquisitive Method of Surface Coordinate Information Based on Parallel Confocal Microscopy

Yu Qing*, Yu Xiaofen, and Bi Meihua
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    Article index updated: Mar. 10, 2025

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    Yu Qing, Yu Xiaofen, Bi Meihua. Research on High-Precision Acquisitive Method of Surface Coordinate Information Based on Parallel Confocal Microscopy[J]. Acta Optica Sinica, 2009, 29(11): 3057

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Dec. 11, 2008

    Accepted: --

    Published Online: Nov. 16, 2009

    The Author Email: Qing Yu (jorson.y@163.com)

    DOI:10.3788/aos20092911.3057

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology