Journal of Synthetic Crystals, Volume. 52, Issue 1, 25(2023)

Broken Edge Prediction in the Equal-Diameter Growth Process of Cz Single Crystal Silicon Based on ISOMAP-DE-SVM

HOU Shaohua1、*, ZHANG Hongshuai1, JIANG Baozhu2, ZHU Binbin3, and TIAN Zengguo2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    References(12)

    [4] [4] SATUNKIN G A. Mathematical modelling and control system design of Czochralski and liquid encapsulated Czochralski processes: the basic low order mathematical model[J]. Journal of Crystal Growth, 1995, 154(1/2): 172-188.

    [5] [5] ARMAOU A, CHRISTOFIDES P D. Crystal temperature control in the Czochralski crystal growth process[J]. AIChE Journal, 2001, 47(1): 79-106.

    [6] [6] LIU D, LIANG J L. A Bayesian approach to diameter estimation in the diameter control system of silicon single crystal growth[J]. IEEE Transactions on Instrumentation and Measurement, 2011, 60(4): 1307-1315.

    [8] [8] KATO S, KIM S, KANO M, et al. Gray-box modeling of 300 mm diameter Czochralski single-crystal Si production process[J]. Journal of Crystal Growth, 2021, 553: 125929.

    [9] [9] REN J C, LIU D, WAN Y. Modeling and application of Czochralski silicon single crystal growth process using hybrid model of data-driven and mechanism-based methodologies[J]. Journal of Process Control, 2021, 104: 74-85.

    [12] [12] ZHANG J, LIU H, CAO J W, et al. A deep learning based dislocation detection method for cylindrical crystal growth process[J]. Applied Sciences, 2020, 10(21): 7799.

    [19] [19] XIAO C W, YE J Q, ESTEVES R M, et al. Using Spearman’s correlation coefficients for exploratory data analysis on big dataset[J]. Concurrency and Computation: Practice and Experience, 2016, 28(14): 3866-3878.

    [20] [20] RESHEF D N, RESHEF Y A, FINUCANE H K, et al. Detecting novel associations in large data sets[J]. Science, 2011, 334(6062): 1518-1524.

    [22] [22] PRICE K V, STRON R M, LAMPINEN J. Differential evolution: a practical approach to global optimization[M]. Springer Science & Business Media, 2005.

    [23] [23] HANCER E, XUE B, ZHANG M J. Differential evolution for filter feature selection based on information theory and feature ranking[J]. Knowledge-Based Systems, 2018, 140: 103-119.

    [24] [24] ABUROMMAN A A, IBNE REAZ M B. A novel weighted support vector machines multiclass classifier based on differential evolution for intrusion detection systems[J]. Information Sciences, 2017, 414: 225-246.

    [26] [26] ANOWAR F, SADAOUI S, SELIM B. Conceptual and empirical comparison of dimensionality reduction algorithms (PCA, KPCA, LDA, MDS, SVD, LLE, ISOMAP, LE, ICA, t-SNE)[J]. Computer Science Review, 2021, 40: 100378.

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    HOU Shaohua, ZHANG Hongshuai, JIANG Baozhu, ZHU Binbin, TIAN Zengguo. Broken Edge Prediction in the Equal-Diameter Growth Process of Cz Single Crystal Silicon Based on ISOMAP-DE-SVM[J]. Journal of Synthetic Crystals, 2023, 52(1): 25

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    Paper Information

    Category:

    Received: Sep. 5, 2022

    Accepted: --

    Published Online: Mar. 18, 2023

    The Author Email: Shaohua HOU (1214455359@qq.com)

    DOI:

    CSTR:32186.14.

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