Journal of Synthetic Crystals, Volume. 52, Issue 1, 25(2023)
Broken Edge Prediction in the Equal-Diameter Growth Process of Cz Single Crystal Silicon Based on ISOMAP-DE-SVM
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HOU Shaohua, ZHANG Hongshuai, JIANG Baozhu, ZHU Binbin, TIAN Zengguo. Broken Edge Prediction in the Equal-Diameter Growth Process of Cz Single Crystal Silicon Based on ISOMAP-DE-SVM[J]. Journal of Synthetic Crystals, 2023, 52(1): 25
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Received: Sep. 5, 2022
Accepted: --
Published Online: Mar. 18, 2023
The Author Email: Shaohua HOU (1214455359@qq.com)
CSTR:32186.14.
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