Acta Optica Sinica, Volume. 34, Issue 7, 712005(2014)
Phase Error Correction Algorithm for Grating Projection Measurement System
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Wu Shuyu, Yang Yimin, Zhong Zhenyu, Lu Xingjian. Phase Error Correction Algorithm for Grating Projection Measurement System[J]. Acta Optica Sinica, 2014, 34(7): 712005
Category: Instrumentation, Measurement and Metrology
Received: Dec. 20, 2013
Accepted: --
Published Online: Jun. 10, 2014
The Author Email: Shuyu Wu (wohejingfeng@163.com)