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Acta Optica Sinica, Volume. 34, Issue 7, 712005(2014)

Phase Error Correction Algorithm for Grating Projection Measurement System

Wu Shuyu1,2、*, Yang Yimin1, Zhong Zhenyu2, and Lu Xingjian2
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    Wu Shuyu, Yang Yimin, Zhong Zhenyu, Lu Xingjian. Phase Error Correction Algorithm for Grating Projection Measurement System[J]. Acta Optica Sinica, 2014, 34(7): 712005

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Dec. 20, 2013

    Accepted: --

    Published Online: Jun. 10, 2014

    The Author Email: Shuyu Wu (wohejingfeng@163.com)

    DOI:10.3788/aos201434.0712005

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology