Researching | Detection of Rotation Angle of Reflective Grating Based on Interference Method

Laser & Optoelectronics Progress, Volume. 56, Issue 11, 110501(2019)

Detection of Rotation Angle of Reflective Grating Based on Interference Method

Wentao Zhang¹, Yueyue Yang¹, Yuting Zhang¹, Ping Wu², Xianming Xiong¹, and Hao Du^1、*

Author Affiliations

¹ School of Electronic Engineering and Automation, Guilin University of Electronic Technology, Guilin, Guangxi 541004, China

² Shanghai Micro Electronics Equipment (Group) Co., Ltd., Shanghai 201203, China

show less

Abstract Get PDF(in Chinese)

Figures&Tables (9)

References (30)

Paper Information

References(30)

[1] Dong J H, Tian X Z, Li Z L et al. Development of 100 nm step-scanning projection photographic machine[J]. Ome Information, 21, 20-24(2004).

Dong J H, Tian X Z, Li Z L et al. Development of 100 nm step-scanning projection photographic machine[J]. Ome Information, 21, 20-24(2004).

[2] Yang X D, Xia L, Ma W X et al. Experiment of real-time monitoring and adjusting of rotation error about tiled gratings[J]. Chinese Journal of Lasers, 34, 1222-1226(2007).

Yang X D, Xia L, Ma W X et al. Experiment of real-time monitoring and adjusting of rotation error about tiled gratings[J]. Chinese Journal of Lasers, 34, 1222-1226(2007).

[3] Hornung M, Bödefeld R, Kessler A et al. Spectrally resolved and phase-sensitive far-field measurement for the coherent addition of laser pulses in a tiled grating compressor[J]. Optics Letters, 35, 2073-2075(2010). http://www.ncbi.nlm.nih.gov/pubmed/20548390

Hornung M, Bödefeld R, Kessler A et al. Spectrally resolved and phase-sensitive far-field measurement for the coherent addition of laser pulses in a tiled grating compressor[J]. Optics Letters, 35, 2073-2075(2010). http://www.ncbi.nlm.nih.gov/pubmed/20548390

[4] Xia L, Yang X D, Xu G et al. Tiled-grating rotation detecting technology[J]. Chinese Journal of Lasers, 38, 0308001(2011).

Xia L, Yang X D, Xu G et al. Tiled-grating rotation detecting technology[J]. Chinese Journal of Lasers, 38, 0308001(2011).

[5] Lu Y X, Qi X D, Mi X T et al. Detection and calculation of mosaic grating error based on wavefront method[J]. Acta Optica Sinica, 36, 0505001(2016).

Lu Y X, Qi X D, Mi X T et al. Detection and calculation of mosaic grating error based on wavefront method[J]. Acta Optica Sinica, 36, 0505001(2016).

[6] Lu Y X, Qi X D, Yu H L et al. Precision analysis of grating replicated mosaic error based on the principle of Fraunhofer[J]. Chinese Journal of Lasers, 43, 0508005(2016).

Lu Y X, Qi X D, Yu H L et al. Precision analysis of grating replicated mosaic error based on the principle of Fraunhofer[J]. Chinese Journal of Lasers, 43, 0508005(2016).

[7] Cong M, Qi X D, Mi X T et al. Influence of incident light angles on mosaic grating errors in optical path for grating replication and mosaic[J]. Optics and Precision Engineering, 25, 3027-3033(2017).

Cong M, Qi X D, Mi X T et al. Influence of incident light angles on mosaic grating errors in optical path for grating replication and mosaic[J]. Optics and Precision Engineering, 25, 3027-3033(2017).

[8] Sharma A K, Joshi A S, Naik P A et al. Active phase locking of a tiled two-grating assembly for high-energy laser pulse compression using simultaneous controls from far-field profiles and interferometry[J]. Applied Physics B, 123, 117(2017). http://link.springer.com/10.1007/s00340-017-6682-2

Sharma A K, Joshi A S, Naik P A et al. Active phase locking of a tiled two-grating assembly for high-energy laser pulse compression using simultaneous controls from far-field profiles and interferometry[J]. Applied Physics B, 123, 117(2017). http://link.springer.com/10.1007/s00340-017-6682-2

[9] Panchuk V E, Klochkova V G, Yushkin M V et al. The high-resolution spectrograph of the 6-m Large Azimuthal Telescope (BTA)[J]. Journal of Optical Technology, 76, 87-97(2009). http://mnras.oxfordjournals.org/external-ref?access_num=10.1364/JOT.76.000087&link_type=DOI

Panchuk V E, Klochkova V G, Yushkin M V et al. The high-resolution spectrograph of the 6-m Large Azimuthal Telescope (BTA)[J]. Journal of Optical Technology, 76, 87-97(2009). http://mnras.oxfordjournals.org/external-ref?access_num=10.1364/JOT.76.000087&link_type=DOI

[10] Sakanoi T, Kasaba Y, Kagitani M et al. Development of infrared Echelle spectrograph and mid-infrared heterodyne spectrometer on a small telescope at Haleakala, Hawaii for planetary observation[J]. Proceedings of SPIE, 9147, 91478D(2014). http://spie.org/Publications/Proceedings/Paper/10.1117/12.2055877

Sakanoi T, Kasaba Y, Kagitani M et al. Development of infrared Echelle spectrograph and mid-infrared heterodyne spectrometer on a small telescope at Haleakala, Hawaii for planetary observation[J]. Proceedings of SPIE, 9147, 91478D(2014). http://spie.org/Publications/Proceedings/Paper/10.1117/12.2055877

[11] Kelly J H, Waxer L J, Bagnoud V et al. OMEGA EP: high-energy petawatt capability for the OMEGA laser facility[J]. Journal de Physique IV (Proceedings), 133, 75-80(2006). http://adsabs.harvard.edu/abs/2006jphy4.133...75k

Kelly J H, Waxer L J, Bagnoud V et al. OMEGA EP: high-energy petawatt capability for the OMEGA laser facility[J]. Journal de Physique IV (Proceedings), 133, 75-80(2006). http://adsabs.harvard.edu/abs/2006jphy4.133...75k

[12] Blanchot N, Bignon E, Coïc H et al. Multi-petawatt high-energy laser project on the LIL facility in Aquitaine[J]. Proceedings of SPIE, 5975, 59750C(2006). http://spie.org/Publications/Proceedings/Paper/10.1117/12.675495

Blanchot N, Bignon E, Coïc H et al. Multi-petawatt high-energy laser project on the LIL facility in Aquitaine[J]. Proceedings of SPIE, 5975, 59750C(2006). http://spie.org/Publications/Proceedings/Paper/10.1117/12.675495

[13] Li Z L, Wang X, Mu J et al. Two-pass full-tiled grating compressor with real-time monitoring and control for XG-III petawatt-class laser facility[J]. Laser Physics, 25, 015301(2015). http://adsabs.harvard.edu/abs/2015LaPhy..25a5301L

Li Z L, Wang X, Mu J et al. Two-pass full-tiled grating compressor with real-time monitoring and control for XG-III petawatt-class laser facility[J]. Laser Physics, 25, 015301(2015). http://adsabs.harvard.edu/abs/2015LaPhy..25a5301L

[14] Zhang S, Zhang J W, Wang Y et al. Theoretical and experimental research of tiling error compensation method based on a small-size mirror for large-aperture tiled-grating compressors[J]. Optics & Laser Technology, 104, 190-196(2018). http://www.sciencedirect.com/science/article/pii/S0030399217310162

Zhang S, Zhang J W, Wang Y et al. Theoretical and experimental research of tiling error compensation method based on a small-size mirror for large-aperture tiled-grating compressors[J]. Optics & Laser Technology, 104, 190-196(2018). http://www.sciencedirect.com/science/article/pii/S0030399217310162

[15] Qian G L, Wu J H, Li C M et al. Compensational method for aberration in mosaic system of holographic grating[J]. Acta Optica Sinica, 37, 0305001(2017).

Qian G L, Wu J H, Li C M et al. Compensational method for aberration in mosaic system of holographic grating[J]. Acta Optica Sinica, 37, 0305001(2017).

Tools

Get Citation

Copy Citation Text

Wentao Zhang, Yueyue Yang, Yuting Zhang, Ping Wu, Xianming Xiong, Hao Du. Detection of Rotation Angle of Reflective Grating Based on Interference Method[J]. Laser & Optoelectronics Progress, 2019, 56(11): 110501

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Diffraction and Gratings

Received: Dec. 12, 2018

Accepted: Jan. 2, 2019

Published Online: Jun. 13, 2019

The Author Email: Hao Du (781057414@qq.com)

DOI:10.3788/LOP56.110501

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology