Detection of Rotation Angle of Reflective Grating Based on Interference Method

Wentao Zhang; Yueyue Yang; Yuting Zhang; Ping Wu; Xianming Xiong; Hao Du

doi:10.3788/LOP56.110501

Laser & Optoelectronics Progress, Volume. 56, Issue 11, 110501(2019)

Detection of Rotation Angle of Reflective Grating Based on Interference Method

Wentao Zhang¹, Yueyue Yang¹, Yuting Zhang¹, Ping Wu², Xianming Xiong¹, and Hao Du^1、*

¹ School of Electronic Engineering and Automation, Guilin University of Electronic Technology, Guilin, Guangxi 541004, China

² Shanghai Micro Electronics Equipment (Group) Co., Ltd., Shanghai 201203, China

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Figures & Tables(9)

Fig. 1. Optical path for detection of grating rotation angle

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$Schematic of diffraction beam change when grating rotating around y-axis$

Fig. 2. Schematic of diffraction beam change when grating rotating around y-axis

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$Schematic of diffraction beam change when grating rotating is around x-axis$

Fig. 3. Schematic of diffraction beam change when grating rotating is around x-axis

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$Schematic of diffraction beam change when grating rotating is around z-axis$

Fig. 4. Schematic of diffraction beam change when grating rotating is around z-axis

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$Simulation results of model. (a) Interference patterns by simulation; (b) result of wavefront reconstruction; (c) relationship between grating rotation angle and diffraction beam deflection angle$

Fig. 5. Simulation results of model. (a) Interference patterns by simulation; (b) result of wavefront reconstruction; (c) relationship between grating rotation angle and diffraction beam deflection angle

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Fig. 6. Experimental setup for grating rotation angle measurement

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Fig. 7. Experimental results of grating rotation angle measurement. (a) Rotating around x-axis; (b) rotating around z-axis

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Table 1. Coefficients of Δθx at different pitch angles Δω of reflector
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Table 1. Coefficients of Δθx at different pitch angles Δω of reflector
Condition Δω₀=0″ Δω₁=5″ Δω₂=10″ Δω₃=20″ ΔC_ω₀ ΔC_ω
1 0.9203 0.9180 ― ― 0.0047 0.0023
2 0.9269 ― 0.9219 ― 0.0019 0.0050
3 0.9196 ― ― 0.9575 0.0054 0.0379

Table 2. Coefficients of Δθx at different yaw angles Δη of reflector
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Table 2. Coefficients of Δθx at different yaw angles Δη of reflector
Condition Δη₀=0″ Δη₁=5″ Δη₂=10″ Δη₃=20″ ΔC_η₀ ΔC_η
1 0.9209 0.9382 ― ― 0.0041 0.0173
2 0.9216 ― 0.9204 ― 0.0034 0.0012
3 0.9193 ― ― 0.9479 0.0057 0.0286

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Wentao Zhang, Yueyue Yang, Yuting Zhang, Ping Wu, Xianming Xiong, Hao Du. Detection of Rotation Angle of Reflective Grating Based on Interference Method[J]. Laser & Optoelectronics Progress, 2019, 56(11): 110501

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