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Piezoelectrics & Acoustooptics, Volume. 46, Issue 4, 496(2024)

Design and Fabrication of High-Frequency PMUT Array Based on an ScAlN Thin Film

TA Guifeng1,2,3, LIU Jianhe1, LI Jiadong1,2,3, YAO Shutao1,2,3, LIU Haojie1,2,3, MIAO Bin2,3, SHANG Wenling2,3,4, and TAO Jinyan2,3,5
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
  • 5[in Chinese]
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    TA Guifeng, LIU Jianhe, LI Jiadong, YAO Shutao, LIU Haojie, MIAO Bin, SHANG Wenling, TAO Jinyan. Design and Fabrication of High-Frequency PMUT Array Based on an ScAlN Thin Film[J]. Piezoelectrics & Acoustooptics, 2024, 46(4): 496

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    Paper Information

    Received: Apr. 23, 2024

    Accepted: --

    Published Online: Sep. 18, 2024

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2024.04.014

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology