Piezoelectrics & Acoustooptics, Volume. 46, Issue 4, 496(2024)

Design and Fabrication of High-Frequency PMUT Array Based on an ScAlN Thin Film

TA Guifeng1,2,3, LIU Jianhe1, LI Jiadong1,2,3, YAO Shutao1,2,3, LIU Haojie1,2,3, MIAO Bin2,3, SHANG Wenling2,3,4, and TAO Jinyan2,3,5
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
  • 5[in Chinese]
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    High-frequency piezoelectric micromechanical ultrasonic transducers (PMUTs) are employed in various applications including fingerprint recognition, non-destructive testing, and medical imaging. In this study, the challenges associated with using lead zirconate titanate piezoelectric ceramics (PZT) in non-invasive vascular imaging and limitations of 1-D PMUT arrays are addressed by designing and fabricating a 2D PMUT array based on ScAlN piezoelectric film. To optimize output performance and minimize gate lobe influence, a parallel-hexagon array is designed with a spacing of half a wavelength (300 μm) to enhance the filling factor, reduce impedance, and improve output current. A silicon-on-insulator (SOI) wafer is utilized as the substrate for the PMUT, facilitating the MEMS process flow and wafer fabrication. The morphology and structure size of the PMUT are characterized using scanning electron microscopy and focused ion beam cutting. The measured resonant frequency in water is 2.36 MHz, with a simulation-test discrepancy of 9.2% and satisfactory displacement sensitivity, suggesting its suitability for non-invasive vascular imaging applications

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    TA Guifeng, LIU Jianhe, LI Jiadong, YAO Shutao, LIU Haojie, MIAO Bin, SHANG Wenling, TAO Jinyan. Design and Fabrication of High-Frequency PMUT Array Based on an ScAlN Thin Film[J]. Piezoelectrics & Acoustooptics, 2024, 46(4): 496

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    Paper Information

    Received: Apr. 23, 2024

    Accepted: --

    Published Online: Sep. 18, 2024

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2024.04.014

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