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Chinese Journal of Lasers, Volume. 40, Issue 1, 108002(2013)

Calibration Method for Mask Grating Mark Imaging in Lithography Alignment

Zhu Jiangping1,2,3、*, Hu Song1, Yu Junsheng2, Tang Yan1, Zhou Shaolin4, and He Yu1,3
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    Zhu Jiangping, Hu Song, Yu Junsheng, Tang Yan, Zhou Shaolin, He Yu. Calibration Method for Mask Grating Mark Imaging in Lithography Alignment[J]. Chinese Journal of Lasers, 2013, 40(1): 108002

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    Paper Information

    Category: measurement and metrology

    Received: Jul. 3, 2012

    Accepted: --

    Published Online: Nov. 22, 2012

    The Author Email: Jiangping Zhu (zsyioe@163.com)

    DOI:10.3788/cjl201340.0108002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology