Chinese Journal of Lasers, Volume. 34, Issue 12, 1682(2007)

Measurement Performance of Simultaneous Phase-Shifting Interferometer

[in Chinese]1,2、*, [in Chinese]1, and [in Chinese]1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(11)

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    [5] [5] A. Hettwer, J. Kranz, J. Schwider. Three channel phase-shifting interferometer using polarization-optics and a diffraction grating [J]. Opt. Eng., 2000, 39(4):960~966

    [6] [6] J. Kranz, J. Lamprecht, A. Hettwer et al.. Fiber optical single frame speckle interferometer for measuring industrial surfaces [C]. SPIE, 1998, 3408:328~331

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    [2] Xu Chen, Su Junhong, Chen Lei, Li Bo. Research on Low-Coherence Dynamic Interferometry[J]. Chinese Journal of Lasers, 2009, 36(s2): 153

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    [in Chinese], [in Chinese], [in Chinese]. Measurement Performance of Simultaneous Phase-Shifting Interferometer[J]. Chinese Journal of Lasers, 2007, 34(12): 1682

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    Paper Information

    Category: measurement and metrology

    Received: Mar. 1, 2007

    Accepted: --

    Published Online: Dec. 15, 2007

    The Author Email: (weile_ni@163.com)

    DOI:

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