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Chinese Journal of Lasers, Volume. 34, Issue 12, 1682(2007)

Measurement Performance of Simultaneous Phase-Shifting Interferometer

[in Chinese]1,2、*, [in Chinese]1, and [in Chinese]1
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    [in Chinese], [in Chinese], [in Chinese]. Measurement Performance of Simultaneous Phase-Shifting Interferometer[J]. Chinese Journal of Lasers, 2007, 34(12): 1682

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    Paper Information

    Category: measurement and metrology

    Received: Mar. 1, 2007

    Accepted: --

    Published Online: Dec. 15, 2007

    The Author Email: (weile_ni@163.com)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology