Study of Residual Stress in ZrO2 Thin Films

Acta Optica Sinica, Volume. 24, Issue 4, 437(2004)

[in Chinese]^*, [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study of Residual Stress in ZrO2 Thin Films[J]. Acta Optica Sinica, 2004, 24(4): 437

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Paper Information

Category: Thin Films

Received: Jan. 3, 2003

Accepted: --

Published Online: Jun. 12, 2006

The Author Email: (shao_shuying@siom.ac.cn)

DOI:

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