Acta Optica Sinica, Volume. 43, Issue 9, 0914001(2023)
Uniformity Removal Based on Processing Prediction Model of Ring-Pendulum Double-Sided Polishing Method
Fig. 4. Inspection results of components. (a) Comparison of actual machining and simulation results of 1# workpiece; (b) comparison of actual machining and simulation results of 2# workpiece; (c) comparison of actual machining and simulation results of 3# workpiece
Fig. 5. Distributions of removal amount from upper and lower surfaces of workpiece. (a) Distribution of removal amount on upper surface; (b) distribution of removal amount on lower surface
Fig. 6. Average removal amount of upper and lower surfaces of workpiece under different groups of parameters
Fig. 7. Mean square error of removal amount of upper and lower surfaces under different groups of parameters
Fig. 8. Trajectory distributions of polishing abrasive particles under different center eccentricity. (a) Center eccentricity is 0 mm; (b) center eccentricity is 15 mm; (c) center eccentricity is 30 mm; (d) center eccentricity is 45 mm; (e) center eccentricity is 60 mm
Fig. 9. Trajectory distributions of polishing abrasive particles under different radial swing distances. (a) Radial swing distance is 0 mm; (b) radial swing distance is 15 mm; (c) radial swing distance is 30 mm; (d) radial swing distance is 45 mm; (e) radial swing distance is 60 mm
Fig. 10. Trajectory distributions of polishing abrasive particles under different radial swing speed. (a) Radial swing speed is 1 mm/s; (b) radial swing speed is 3 mm/s; (c) radial swing speed is 5 mm/s; (d) radial swing speed is 7 mm/s; (e) radial swing speed is 9 mm/s
Fig. 11. Initial surfaces of different workpieces. (a) Initial surface of 1# workpiece; (b) initial surface of 2# workpiece
Fig. 12. Inspection results of experimental components. (a) Machined surface of 1# workpiece; (b) machined surface of 2# workpiece
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Chunyang Wang, Wen Shuai, Bo Xiao, Siling Huang, Dasen Wang. Uniformity Removal Based on Processing Prediction Model of Ring-Pendulum Double-Sided Polishing Method[J]. Acta Optica Sinica, 2023, 43(9): 0914001
Category: Lasers and Laser Optics
Received: Oct. 21, 2022
Accepted: Dec. 16, 2022
Published Online: May. 9, 2023
The Author Email: Xiao Bo (13610701380@126.com)