Uniformity Removal Based on Processing Prediction Model of Ring-Pendulum Double-Sided Polishing Method

Chunyang Wang; Wen Shuai; Bo Xiao; Siling Huang; Dasen Wang

doi:10.3788/AOS221863

Acta Optica Sinica, Volume. 43, Issue 9, 0914001(2023)

Uniformity Removal Based on Processing Prediction Model of Ring-Pendulum Double-Sided Polishing Method

Chunyang Wang^1,2, Wen Shuai², Bo Xiao^3、*, Siling Huang⁴, and Dasen Wang⁴

¹Xi'an Key Laboratory of Active Photoelectric Imaging Detection Technology, Xi'an Technological University, Xi'an 710021, Shaanxi , China

²School of Electronic and Information Engineering, Changchun University of Science and Technology, Changchun 130022, Jilin , China

³School of Optoelectronic Engineering, Xi'an Technological University, Xi'an 710021, Shaanxi , China

⁴Ningbo Branch of Chinese Academy of Ordnance Science, Ningbo 315103, Zhejiang , China

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Chunyang Wang, Wen Shuai, Bo Xiao, Siling Huang, Dasen Wang. Uniformity Removal Based on Processing Prediction Model of Ring-Pendulum Double-Sided Polishing Method[J]. Acta Optica Sinica, 2023, 43(9): 0914001

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Paper Information

Category: Lasers and Laser Optics

Received: Oct. 21, 2022

Accepted: Dec. 16, 2022

Published Online: May. 9, 2023

The Author Email: Bo Xiao (13610701380@126.com)

DOI:10.3788/AOS221863

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology