Acta Optica Sinica, Volume. 43, Issue 9, 0914001(2023)
Uniformity Removal Based on Processing Prediction Model of Ring-Pendulum Double-Sided Polishing Method
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Chunyang Wang, Wen Shuai, Bo Xiao, Siling Huang, Dasen Wang. Uniformity Removal Based on Processing Prediction Model of Ring-Pendulum Double-Sided Polishing Method[J]. Acta Optica Sinica, 2023, 43(9): 0914001
Category: Lasers and Laser Optics
Received: Oct. 21, 2022
Accepted: Dec. 16, 2022
Published Online: May. 9, 2023
The Author Email: Bo Xiao (13610701380@126.com)