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Acta Optica Sinica, Volume. 19, Issue 5, 698(1999)

OPC with Grey Level Mask and Its Computer Simulation Study

[in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]2, and [in Chinese]3
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. OPC with Grey Level Mask and Its Computer Simulation Study[J]. Acta Optica Sinica, 1999, 19(5): 698

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Feb. 9, 1998

    Accepted: --

    Published Online: Aug. 9, 2006

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    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology