Fig. 1. (a) Diamond LIPSSs induced by different pulse energies. (b) Diamond LIPSSs induced by different numbers of pulses. (c) Simulated electric field distributions of LIPSSs induced by different numbers of pulses. (d) Electric field distribution curves of LIPSSs induced by 10 laser pulses. (e) Electric field distribution curves of LIPSSs induced by 20 laser pulses.

Fig. 2. (a) Scheme of femtosecond laser line spot processing with cylindrical lens shaping and the image of the affected area produced by the laser acting on the diamond surface. The scale bar is 5 µm. (b) SEM images of line-spot-induced LIPSSs at different scanning speeds. (c) SEM images of LIPSSs at different laser powers. The energies from top to bottom are: 13.2, 13.4, 13.8, 14, 14.2, 14.5, 14.6 and 14.7 mW. (d), (e) Images of large-area LIPSSs induced by a laser with a power of 14.2 mW. The red arrow indicates the scanning direction and the yellow arrow indicates the laser polarization direction.

Fig. 3. (a) SEM images of LIPSSs structure after post-single scanning with different power focused surface lasers. (b) SEM images of LIPSSs structure after double scanning with different power focused surface lasers. The red arrow indicates the scanning direction and the yellow arrow indicates the laser polarization direction.

Fig. 4. (a) SEM images of LIPSSs after a single scan of the processed area by femtosecond laser at a different defocus distances. (b) SEM images of LIPSSs after a single scan of the processed area by femtosecond laser at a fixed defocus distance of 7 µm with different scanning speeds. The red arrow indicates the scanning direction and the yellow arrow indicates the laser polarization direction.

Fig. 5. (a) SEM images of diamond LIPSSs with different magnifications after laser cleaning. (b) Optical transmittance curves of diamond with LIPSS structure. (c) Optical reflectivity curves of diamond with LIPSS structure. The red arrow indicates the scanning direction and the yellow arrow indicates the laser polarization direction.