Magnetron sputtering NiO<i><sub>x</sub></i> for perovskite solar cells

Xiangyi Shen; Xinwu Ke; Yingdong Xia; Qingxun Guo; Yonghua Chen

doi:10.1088/1674-4926/24100032

Journal of Semiconductors, Volume. 46, Issue 5, 051803(2025)

Magnetron sputtering NiO_x for perovskite solar cells

Xiangyi Shen, Xinwu Ke, Yingdong Xia^*, Qingxun Guo^*, and Yonghua Chen^*

Key Laboratory of Flexible Electronics (KLoFE) & Institute of Advanced Materials (IAM), School of Flexible Electronics (Future Technologies), Nanjing Tech University (NanjingTech), Nanjing 211816, China

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References(88)

[1] B F Liu, L S Bai, T T Li et al. High efficiency and high open-circuit voltage quadruple-junction silicon thin film solar cells for future electronic applications. Energy Environ Sci, 10, 1134(2017).

[2] X B Yang, J X Kang, W Z Liu et al. Solution-doped polysilicon passivating contacts for silicon solar cells. ACS Appl Mater Interfaces, 13, 8455(2021).

[3] J Ramanujam, U P Singh. Copper indium gallium selenide based solar cells–a review. Energy Environ Sci, 10, 1306(2017).

[4] J D Poplawsky. Cadmium telluride solar cells: Record-breaking voltages. Nat Energy, 1, 16021(2016).

[6] J W Jo, M S Seo, M Park et al. Improving performance and stability of flexible planar-heterojunction perovskite solar cells using polymeric hole-transport material. Adv Funct Mater, 26, 4464(2016).

[7] D W Zhao, M Sexton, H Y Park et al. High-efficiency solution-processed planar perovskite solar cells with a polymer hole transport layer. Adv Energy Mater, 5, 1401855(2015).

[8] Y Kim, E H Jung, G Kim et al. Sequentially fluorinated PTAA polymers for enhancing VOC of high-performance perovskite solar cells. Adv Energy Mater, 8, 1801668(2018).

[9] C B Fei, A Kuvayskaya, X Q Shi et al. Strong-bonding hole-transport layers reduce ultraviolet degradation of perovskite solar cells. Science, 384, 1126(2024).

[10] K M Reza, A Gurung, B Bahrami et al. Tailored PEDOT: PSS hole transport layer for higher performance in perovskite solar cells: Enhancement of electrical and optical properties with improved morphology. J Energy Chem, 44, 41(2020).

[11] Q S Wei, M Mukaida, Y Naitoh et al. Morphological change and mobility enhancement in PEDOT: PSS by adding co-solvents. Adv Mater, 25, 2831(2013).

[12] S C Chen, T Kuo, H C Lin et al. Optoelectronic properties of p-type NiO films deposited by direct current magnetron sputtering versus high power impulse magnetron sputtering. Appl Surf Sci, 508, 145106(2020).

[13] Z H Chen, S H Qin, J Y Jin et al. Manipulating carrier concentration by self-assembled monolayers in thermoelectric polymer thin films. ACS Appl Mater Interfaces, 13, 32067(2021).

[14] M L Feng, M Wang, H P Zhou et al. Optoelectronic modulation of undoped NiOx films for inverted perovskite solar cells via intrinsic defect regulation. ACS Appl Energy Mater, 3, 9732(2020).

[15] H Kim, M D Kumar, M Patel et al. ITO nanowires-embedding transparent NiO/ZnO photodetector. Mater Res Bull, 83, 35(2016).

[16] X Q Li, D P Li, J C Xu et al. Mesoporous-structure enhanced gas-sensing properties of nickel oxides nanowires. Mater Res Bull, 89, 280(2017).

[17] S M Mohammad, Z Hassan, N M Abd-Alghafour et al. Ultraviolet electroluminescence from flowers-like n-ZnO nanorods/p-GaN light-emitting diode fabricated by modified chemical bath deposition. J Lumin, 226, 117510(2020).

[18] Z Li, X L Sun, X P Zheng et al. Stabilized hole-selective layer for high-performance inverted p-i-n perovskite solar cells. Science, 382, 284(2023).

[19] Z W Qiu, H B Gong, G Zheng et al. Enhanced physical properties of pulsed laser deposited NiO films via annealing and lithium doping for improving perovskite solar cell efficiency. J Mater Chem C, 5, 7084(2017).

[20] G J Li, Y B Jiang, S B Deng et al. Overcoming the limitations of sputtered nickel oxide for high-efficiency and large-area perovskite solar cells. Adv Sci, 4, 1700463(2017).

[21] T Abzieher, S Moghadamzadeh, F Schackmar et al. Electron-beam-evaporated nickel oxide hole transport layers for perovskite-based photovoltaics. Adv Energy Mater, 9, 1802995(2019).

[22] N Phung, M Verheijen, A Todinova et al. Enhanced self-assembled monolayer surface coverage by ALD NiO in p-i-n perovskite solar cells. ACS Appl Mater Interfaces, 14, 2166(2022).

[23] S W Liu, J B Li, W S Xiao et al. Buried interface molecular hybrid for inverted perovskite solar cells. Nature, 632, 536(2024).

[24] M K Son, L Steier, M Schreier et al. A copper nickel mixed oxide hole selective layer for Au-free transparent cuprous oxide photocathodes. Energy Environ Sci, 10, 912(2017).

[25] L Pan, C Liu, H Zhu et al. Fine modification of reactively sputtered NiOX hole transport layer for application in all-inorganic CsPbI2Br perovskite solar cells. Sol Energy, 196, 521(2020).

[26] J Y Zhang, W W Li, R L Z Hoye et al. Electronic and transport properties of Li-doped NiO epitaxial thin films. J Mater Chem C, 6, 2275(2018).

[27] X T Yin, Y X Guo, H X Xie et al. Nickel oxide as efficient hole transport materials for perovskite solar cells. Sol RRL, 3, 1900001(2019).

[28] C Y Chang, Y W Wu, S H Yang et al. Preparation of nickel oxide nanoflakes for carrier extraction and transport in perovskite solar cells. Nanomaterials, 12, 3336(2022).

[29] S Dewan, M Tomar, R P Tandon et al. Zn doping induced conductivity transformation in NiO films for realization of p-n homo junction diode. J Appl Phys, 121, 215307(2017).

[30] Z H Liu, A L Zhu, F S Cai et al. Nickel oxide nanoparticles for efficient hole transport in p-i-n and n-i-p perovskite solar cells. J Mater Chem A, 5, 6597(2017).

[31] E Ochoa-Martinez, S Bijani-Chiquero, M Del Valle Martínez de Yuso et al. Nanocrystalline flash annealed nickel oxide for large area perovskite solar cells. Adv Sci, 10, 2302549(2023).

[32] K S Usha, R Sivakumar, C Sanjeeviraja. Preparation of pure NiO thin film by radio frequency magnetron sputtering technique and investigation on its properties. J Mater Sci Mater Electron, 33, 16136(2022).

[33] X Xie, C Gao, X Du et al. Improved optical and electrochromic properties of NiOx films by low-temperature spin-coating method based on NiOx nanoparticles. Materials, 11, 760(2018).

[34] M I Hossain, A K Mahmud Hasan, W Qarony et al. Electrical and optical properties of nickel-oxide films for efficient perovskite solar cells. Small Meth, 4, 2000454(2020).

[35] Y H Kwon, S H Chun, J H Han et al. Correlation between electrical properties and point defects in NiO thin films. Met Mater Int, 18, 1003(2012).

[36] P Salunkhe, A V M Ali, D Kekuda. Structural, spectroscopic and electrical properties of dc magnetron sputtered NiO thin films and an insight into different defect states. Appl Phys A, 127, 390(2021).

[37] S K Kim, H J Seok, D H Kim et al. Comparison of NiOx thin film deposited by spin-coating or thermal evaporation for application as a hole transport layer of perovskite solar cells. RSC Adv, 10, 43847(2020).

[38] S Q Yu, Z Xiong, H T Zhou et al. Homogenized NiOx nanoparticles for improved hole transport in inverted perovskite solar cells. Science, 382, 1399(2023).

[39] J B You, L Meng, T B Song et al. Improved air stability of perovskite solar cells via solution-processed metal oxide transport layers. Nat Nanotechnol, 11, 75(2016).

[40] T Mahmoudi, Y S Wang, Y B Hahn. Highly stable perovskite solar cells based on perovskite/NiO-graphene composites and NiO interface with 25.9mA/cm2 photocurrent density and 20.8% efficiency. Nano Energy, 79, 105452(2021).

[41] S Park, D W Kim, S Y Park. Improved stability and efficiency of inverted perovskite solar cell by employing nickel oxide hole transporting material containing ammonium salt stabilizer. Adv Funct Mater, 32, 2200437(2022).

[42] K O Ukoba, A C Eloka-Eboka, F L Inambao. Review of nanostructured NiO thin film deposition using the spray pyrolysis technique. Renew Sustain Energy Rev, 82, 2900(2018).

[43] W J Scheideler, N Rolston, O Zhao et al. Rapid aqueous spray fabrication of robust NiOx: A simple and scalable platform for efficient perovskite solar cells. Adv Energy Mater, 9, 1803600(2019).

[44] X Cai, T Hu, H Hou et al. A review for nickel oxide hole transport layer and its application in halide perovskite solar cells. Mater Today Sustain, 23, 100438(2023).

[45] A S Subbiah, A Halder, S Ghosh et al. Inorganic hole conducting layers for perovskite-based solar cells. J Phys Chem Lett, 5, 1748(2014).

[46] N A Shepelin, Z P Tehrani, N Ohannessian et al. A practical guide to pulsed laser deposition. Chem Soc Rev, 52, 2294(2023).

[47] J H Park, J Seo, S Park et al. Efficient CH3NH3PbI3 perovskite solar cells employing nanostructured p-type NiO electrode formed by a pulsed laser deposition. Adv Mater, 27, 4013(2015).

[48] X T Yu, C Liu, C Li et al. Controlled NiOx defect engineering to harnessing redox reactions in perovskite photovoltaic cells via atomic layer deposition. ACS Appl Mater Interfaces, 16, 31114(2024).

[49] H Park, P Nandi, Y In et al. Practical and thermal atomic layer deposition of NiO as hole-transporting layers for inverted perovskite solar cells. Sol RRL, 8, 2300858(2024).

[50] P Yadav, B Ajitha, Y Reddy et al. Effect of sputter pressure on UV photodetector performance of WO3 thin films. Appl Surf Sci, 536, 147947(2021).

[51] P Singh, D Kaur. Room temperature growth of nanocrystalline anatase TiO2 thin films by dc magnetron sputtering. Phys B Condens Matter, 405, 1258(2010).

[52] M Y Yan, T X Xiang, X X Yu et al. Room-temperature sputtered NiOx for hysteresis-free and stable inverted Cs-FA mixed-cation perovskite solar cells. Mater Sci Semicond Process, 115, 105129(2020).

[53] M B Islam, M Yanagida, Y Shirai et al. NiOx hole transport layer for perovskite solar cells with improved stability and reproducibility. ACS Omega, 2, 2291(2017).

[54] E Erdenebileg, N Tiwari, F U Kosasih et al. Co-evaporated p-i-n perovskite solar cells with sputtered NiOx hole transport layer. Mater Today Chem, 30, 101575(2023).

[55] Y Ashok Kumar Reddy, A Sivasankar Reddy, P Sreedhara Reddy. Substrate temperature dependent properties of Cu doped NiO films deposited by DC reactive magnetron sputtering. J Mater Sci Technol, 29, 647(2013).

[56] Y Tao, B L Zhu, Y T Yang et al. The structural, electrical, and optical properties of SnO2 films prepared by reactive magnetron sputtering: Influence of substrate temperature and O2 flow rate. Mater Chem Phys, 250, 123129(2020).

[57] X L Zheng, Z N Song, Z L Chen et al. Interface modification of sputtered NiOx as the hole-transporting layer for efficient inverted planar perovskite solar cells. J Mater Chem C, 8, 1972(2020).

[58] J D Hwang, T H Ho. Effects of oxygen content on the structural, optical, and electrical properties of NiO films fabricated by radio-frequency magnetron sputtering. Mater Sci Semicond Process, 71, 396(2017).

[59] Ö Tuna, A K Mak, O Öztürk et al. Influence of oxygen partial pressure on the structural, optical and electrochromic properties of NiO thin films grown by magnetron sputtering. Appl Phys A, 129, 820(2023).

[60] A B Huang, L Lei, Y X Chen et al. Minimizing the energy loss of perovskite solar cells with Cu+ doped NiOx processed at room temperature. Sol Energy Mater Sol Cells, 182, 128(2018).

[61] A B Huang, J T Zhu, J Y Zheng et al. Achieving high-performance planar perovskite solar cells with co-sputtered Co-doping NiOx hole transport layers by efficient extraction and enhanced mobility. J Mater Chem C, 4, 10839(2016).

[62] W Y Nie, H Tsai, J C Blancon et al. Critical role of interface and crystallinity on the performance and photostability of perovskite solar cell on nickel oxide. Adv Mater, 30, 1703879(2018).

[63] Y Wei, K Yao, X F Wang et al. Improving the efficiency and environmental stability of inverted planar perovskite solar cells via silver-doped nickel oxide hole-transporting layer. Appl Surf Sci, 427, 782(2018).

[64] W Zhang, H L Shen, J W Ge et al. Magnetron sputtered Al-doped NiOx films as a hole transport layer for perovskite solar cells. J Mater Sci, 57, 15889(2022).

[65] A R M Alghamdi, M Yanagida, Y Shirai et al. Surface passivation of sputtered NiOx using a SAM interface layer to enhance the performance of perovskite solar cells. ACS Omega, 7, 12147(2022).

[66] X Yan, J H Zheng, L L Zheng et al. Optimization of sputtering NiOx films for perovskite solar cell applications. Mater Res Bull, 103, 150(2018).

[67] T Guo, S Yun, Y X Li et al. Magnetron sputtered all-metal-oxide layers with balanced charge carrier transport efficiency for long-term stable perovskite solar cells. Sol Energy, 208, 652(2020).

[68] E Aydin, J Troughton, M De Bastiani et al. Room-temperature-sputtered nanocrystalline nickel oxide as hole transport layer for p–i–n perovskite solar cells. ACS Appl Energy Mater, 1, 6227(2018).

[69] A Itzhak, X He, A D Kama et al. NiN-passivated NiO hole-transport layer improves halide perovskite-based solar cell. ACS Appl Mater Interfaces, 14, 47587(2022).

[70] J J Sun, C H Shou, J S Sun et al. NiO-seeded self-assembled monolayers as highly hole-selective passivating contacts for efficient inverted perovskite solar cells. Sol RRL, 5, 2100663(2021).

[71] S Zhumagali, F H Isikgor, P Maity et al. Linked nickel oxide/perovskite interface passivation for high-performance textured monolithic tandem solar cells. Adv Energy Mater, 11, 2101662(2021).

[72] M Tutundzic, X Zhang, S Lammar et al. Toward efficient and fully scalable sputtered NiO-based inverted perovskite solar modules via co-ordinated modification strategies. Sol RRL, 8, 2300862(2024).

[73] L Wang, T Zhang, S H Yuan et al. Over 19% efficiency perovskite solar modules by simultaneously suppressing cation deprotonation and iodide oxidation. ACS Appl Mater Interfaces, 16, 4751(2024).

[74] X Zhang, W M Qiu, S Apergi et al. Minimizing the interface-driven losses in inverted perovskite solar cells and modules. ACS Energy Lett, 8, 2532(2023).

[75] L Mao, T Yang, H Zhang et al. Fully textured, production-line compatible monolithic perovskite/silicon tandem solar cells approaching 29% efficiency. Adv Mater, 34, 2206193(2022).

[76] P Gostishchev, L O Luchnikov, O Bronnikov et al. Ion-beam sputtering of NiOx hole transporting layers for p–i–n halide perovskite solar cells. ACS Appl Energy Mater, 7, 919(2024).

[77] G D Niu, S Y Wang, J W Li et al. Oxygen doping in nickel oxide for highly efficient planar perovskite solar cells. J Mater Chem A, 6, 4721(2018).

[78] X F Xia, Y H Jiang, Q X Wan et al. Lithium and silver co-doped nickel oxide hole-transporting layer boosting the efficiency and stability of inverted planar perovskite solar cells. ACS Appl Mater Interfaces, 10, 44501(2018).

[79] D S Mann, S N Kwon, S Thakur et al. Suppressing redox reactions at the perovskite-nickel oxide interface with zinc nitride to improve the performance of perovskite solar cells. Small, 20, 2311362(2024).

[80] C C Boyd, R C Shallcross, T Moot et al. Overcoming redox reactions at perovskite-nickel oxide interfaces to boost voltages in perovskite solar cells. Joule, 4, 1759(2020).

[81] H C Tang, Z C Shen, Y Z Shen et al. Reinforcing self-assembly of hole transport molecules for stable inverted perovskite solar cells. Science, 383, 1236(2024).

[82] Q Cao, T Y Wang, X Y Pu et al. Co-self-assembled monolayers modified NiO for stable inverted perovskite solar cells. Adv Mater, 36, 2311970(2024).

[83] Y B Jin, H P Feng, Y J Li et al. Recrystallizing sputtered NiOx for improved hole extraction in perovskite/silicon tandem solar cells. Adv Energy Mater, 2403911(2024).

[84] W Chen, Y C Zhou, G C Chen et al. Alkali chlorides for the suppression of the interfacial recombination in inverted planar perovskite solar cells. Adv Energy Mater, 9, 1803872(2019).

[85] N Pant, A Kulkarni, M Yanagida et al. Passivation of bulk and interface defects in sputtered-NiOx-based planar perovskite solar cells: A facile interfacial engineering strategy with alkali metal halide salts. ACS Appl Energy Mater, 4, 4530(2021).

[86] B J Zhang, J Su, X Guo et al. NiO/perovskite heterojunction contact engineering for highly efficient and stable perovskite solar cells. Adv Sci, 7, 1903044(2020).

[87] K Xiao, Y H Lin, M Zhang et al. Scalable processing for realizing 21.7%-efficient all-perovskite tandem solar modules. Science, 376, 762(2022).

[88] H Y Li, C Zhang, C Gong et al. 2D/3D heterojunction engineering at the buried interface towards high-performance inverted methylammonium-free perovskite solar cells. Nat Energy, 8, 946(2023).

[89] Y H Yang, S Y Cheng, X L Zhu et al. Inverted perovskite solar cells with over 2, 000 h operational stability at 85 °C using fixed charge passivation. Nat Energy, 9, 37(2024).

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Xiangyi Shen, Xinwu Ke, Yingdong Xia, Qingxun Guo, Yonghua Chen. Magnetron sputtering NiO_x for perovskite solar cells[J]. Journal of Semiconductors, 2025, 46(5): 051803

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Paper Information

Category: Research Articles

Received: Oct. 24, 2024

Accepted: --

Published Online: Jun. 4, 2025

The Author Email: Yingdong Xia (YDXia), Qingxun Guo (QXGuo), Yonghua Chen (YHChen)

DOI:10.1088/1674-4926/24100032

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