Journal of Semiconductors, Volume. 46, Issue 5, 051803(2025)
Magnetron sputtering NiOx for perovskite solar cells
Fig. 2. (Color online) The schematic diagram of the topics in this review.
Fig. 3. (Color online) (a) Crystal structure of NiOx[23]. (b) The conduction mechanism of NiOx, where Vc represents Ni2+ vacancies[25]. (c) Schematic diagram of the electronic structure of NiOx[26]. (d) Resistivity of Zn-doped NiOx films with different doping ratios[29]. (e) Top-view SEM images of NiOx thin films deposited on FTO[28]. (f) XRD patterns of NiOx thin films[33].
Fig. 5. (Color online) (a) Schematic diagram of the sputtering under low and high sputtering pressure conditions[50]. (b) AFM images of NiOx films and bare glass deposited at different pressures. (c) Transmittance of NiOx thin films deposited by magnetron sputtering under various pressures[52]. (d) Conductivity variation with Ni3+/Ni2+ ratio, and XPS images of NiOx films at 4 mTorr (inset)[54]. (e) XRD patterns of Cu-doped NiOx films with different substrate temperatures[55]. (f) The Ni3+/Ni2+ ratio of NiOx thin films sputtered under various oxygen content[58]. (g) A chart of the energy levels of device functional layers[60]. (h) Structure diagram of aluminum-doped NiOx. (i) J−V curve of perovskite devices based on NiOx and AlyNi1−yOx[64].
Fig. 6. (Color online) (a) The energy levels of common perovskites used in inverted PSCs with magnetron-sputtered NiOx as the HTL[20, 52, 71, 72, 77]. (b) Efficiency evolution of PSCs based on magnetron-sputtered NiOx as HTL[20, 52, 54, 57, 65−74]. (c) Long-term stability of devices based on NiOx and MeO-4PADBC at different temperatures[18]. (d) The J−V curve of the 100 cm² minimodules based on NiOx/Me-4PACz[72]. (e) Schematic diagram of the tandem PSCs with ITO/NiOx as the connecting layer[75]. (f) Flexible perovskite solar cell devices based on NiOx[76].
Fig. 7. (Color online) (a) The energy band diagram of NiOx, interlayer, and perovskites with different bandgaps. (b) The J−V curves of 1.53 eV devices with NiOx, MeO-4PADBC, and NiOx/MeO-4PADBC as HTLs[18]. (c) Schematic diagram of the redox degradation mechanism at the NiOx/perovskite interface[73]. (d) Dark and light J−V curves with excess A-site ion PSCs[80].
Fig. 8. (Color online) (a) Schematic diagram of molecular anchoring group of SAMs[81]. (b) Electrostatic potential of PC molecules and mechanism of co-SAMs modified interface[82]. (c) The corresponding potential histograms of ITO and ITO/NiOx films before and after the adsorption of MeO-2PACz[70]. (d) Energy level diagram for pristine NiOx and NiOx/MeO-2PACz[65]. (e) Schematic diagrams of the NaIO4-modified NiOx film experimental process and the binding of SAMs[83].
Fig. 9. (Color online) (a) Schematic diagram of the structure with NaCl interface introduced between NiOx and perovskite[84]. (b) XRD patterns of the perovskite layer with and without CsBr interfacial layer between NiOx and perovskite[85]. (c) Top-view SEM of NiOx/perovskite and NiOx/CsBr/perovskite. (d) UPS spectra of the work function and valence band regions for NiOx film and NiOx/CsBr film[86]. (e) Chemical structure of the N719 molecule, and the electrostatic potential diagram, and three-dimensional charge density difference diagram of the NiOx(001)/N719/PbI2-rich MAPbI3(001) interface[71]. (f) Schematic electronic structure and carrier distribution of AlOx/perovskite and SiOx/perovskite heterojunctions[89].
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Xiangyi Shen, Xinwu Ke, Yingdong Xia, Qingxun Guo, Yonghua Chen. Magnetron sputtering NiOx for perovskite solar cells[J]. Journal of Semiconductors, 2025, 46(5): 051803
Category: Research Articles
Received: Oct. 24, 2024
Accepted: --
Published Online: Jun. 4, 2025
The Author Email: Yingdong Xia (YDXia), Qingxun Guo (QXGuo), Yonghua Chen (YHChen)