Semiconductor Optoelectronics, Volume. 46, Issue 4, 742(2025)

Autofocus Window for Laser-Based Surface Microstructuring

ZHANG Jiajun1,2, YU Zhanjiang1,2, and LI Yiquan1,2
Author Affiliations
  • 1School of Mechanical and Electrical Engineering
  • 2Ministry of Education Key Laboratory for Cross-Scale Micro and Nano Manufacturing, Changchun University of Science and Technology, Changchun 130022, CHN
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    ZHANG Jiajun, YU Zhanjiang, LI Yiquan. Autofocus Window for Laser-Based Surface Microstructuring[J]. Semiconductor Optoelectronics, 2025, 46(4): 742

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    Paper Information

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    Received: Jul. 2, 2025

    Accepted: Sep. 18, 2025

    Published Online: Sep. 18, 2025

    The Author Email:

    DOI:10.16818/j.issn1001-5868.20250702001

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