Autofocus Window for Laser-Based Surface Microstructuring

ZHANG Jiajun; YU Zhanjiang; LI Yiquan

doi:10.16818/j.issn1001-5868.20250702001

Semiconductor Optoelectronics, Volume. 46, Issue 4, 742(2025)

Autofocus Window for Laser-Based Surface Microstructuring

ZHANG Jiajun^1,2, YU Zhanjiang^1,2, and LI Yiquan^1,2

Author Affiliations

¹School of Mechanical and Electrical Engineering

²Ministry of Education Key Laboratory for Cross-Scale Micro and Nano Manufacturing, Changchun University of Science and Technology, Changchun 130022, CHN

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ZHANG Jiajun, YU Zhanjiang, LI Yiquan. Autofocus Window for Laser-Based Surface Microstructuring[J]. Semiconductor Optoelectronics, 2025, 46(4): 742

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Paper Information

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Received: Jul. 2, 2025

Accepted: Sep. 18, 2025

Published Online: Sep. 18, 2025

The Author Email:

DOI:10.16818/j.issn1001-5868.20250702001

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology