Acta Optica Sinica, Volume. 44, Issue 15, 1513011(2024)

Silicon Photoelectron Chip Integrated Active Devices Based on Colloidal Quantum Dots (Invited)

Junling Qu, Peng Liu, Xuetao Gan*, and Jianlin Zhao
Author Affiliations
  • School of Physical Science and Technology, Key Laboratory of Light Field Regulation and Information Perception, Ministry of Industry and Information Technology, Shaanxi Provincial Key Laboratory of Optical Information Technology, Northwestern Polytechnical University, Xi’an 710129, Shaanxi , China
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    Figures & Tables(19)
    Solution-based synthesis of CQDs and their assembly into semiconductor optoelectronic thin films. (a) Hot-injection synthesis of CQD; (b) diagram of typical structure of single CQD with inorganic quantum dot core and organic long-chain ligands[30]; (c) integration of CQD film to the CMOS readout circuit and its use as infrared sensor in a focal plane array[17]; (d) scanning electron microscope (SEM) cross-sectional image of a thin film made of densely packed CQDs[41]
    Quantum confinement size effect and heterostructure of CQD. (a) Electronic energy levels in a bulk semiconductor and spherical CQDs made of the same material but of different size[45]; (b) absorption spectra of PbS CQD with size ranging from 4.3 nm to 8.4 nm[46]; (c) band alignments of different heterostructured CQDs
    Applications corresponding to different bands in electromagnetic waves, transparency window of the silicon-based optoelectronic platform, and the spectrum range covered by different CQDs
    Complex refractive index of CQD film. Refractive indexes n and extinction coefficients k of PbS CQD films capped with (a) oleic acid, (b) 1,2-ethanedithiol (EDT), and (c) I-[51]; (d) refractive indexes and linear absorption coefficients of different-sized CdSe QD films[56]; (e) complex refractive index of self-assembled CQW film; (f) cross-sectional TEM image of the quasi-symmetric waveguide[62]
    Optical-gain model of CQD and the methods to measure its optical gain characteristics. In the (a) ground state, (b) single-exciton state, and (c) biexciton state, the CQD absorbs, transmits or magnifies an incident photon[67]; (d)(e) TA measurement[68] and (f)(g) VSL measurement[69] of CQD optical gain characteristics
    Diagrams of ligand exchange process[82]. (a) Solid state ligand exchange; (b) phase transfer ligand exchange
    Effect of CQD surface ligand on the energy level position and the doping of the semiconductor thin film. (a) Energy level positions of various ligand-exchanged PbS CQD thin films[87]; (b) the tuning of doping type and magnitude during the phase shift ligand exchange of HgTe CQDs[91]
    Methods to pattern CQD film. (a) Photolithography[94]; (b) inkjet-printing[96]; (c) electrohydrodynamic jet printing[97]; (d) 3D printing[98]; (e) transfer printing[100]
    Plasmonic waveguide-integrated CQD photodetector[109]. (a) Schematic of the plasmonic-silicon hybrid waveguide system. The arrows show the light propagation direction. Inset is the cross-section of the MIM waveguide coated with HgTe CQD; (b) the schematic of the cross-section of HgTe CQD-coated MIM waveguide and the simulated electric field distribution; SEM images of (c) the TE apodized silicon grating coupler and (d) photoconductive detector region after depositing CQD; (e) I-V curves under dark conditions and different light input powers at 2.3 µm; (f) net photocurrent and responsivity as functions of input light power under 2 V bias
    SiN waveguide-integrated CQD photodiode detector[110]. (a) Device structure of waveguide coupled PbS CQD photodiode; (b) photon-generated carrier concentration distribution on PbS-PbI2 absorption layer of the evanescent coupled photodiode; (c) I-V curves of photodiode under dark conditions and illumination at 1275 nm; (d) top view of the integrated spectrometer with a CQD photodiode array and arrayed waveguide grating. Light is injected from the right grating coupler; (e) normalized photocurrent of eight channels under zero bias
    Waveguide-integrated CQD LEDs[112]. (a) Top-view of the device layout, with the dashed line indicating the location of the cross-section; (b) high-resolution SEM of a focused ion beam (FIB) cross-section; (c) optical microscope image of the sample; (d) band-alignment of the LED; (e) photoluminescence and electroluminescence spectra of CQD; (f) output optical power in a single-mode waveguide varying with LED current
    On-chip integration of self-assembled CQD lasers. (a) Water droplet induced CQD film splitting process; (b) optical image of the CQD microplate and the grating coupling waveguide; (c) the emission spectrum from the CQD microplate laser (P1) and the scattered spectrum from the waveguide (P2)[115]; (d) illustration of the CQD emulsion droplets nucleating into superparticle; (e) microscope and (f) CCD image of superparticle located beside the SU8 waveguide[121]
    Template-assisted on-chip CQD lasers. (a) Laplace pressure balances the pinning force of CQD and substrate, allowing for continuous moving of liquid front and regulated CQDs assembly; (b)(c) SEM image and the emission spectra above lasing threshold of the microring-waveguide coupling system fabricated by method in Fig. 13(a)[101]; (d)-(g) EBL-assisted fabrication process of CQD microcavity and waveguide, the optical image and the false-colored SEM image of the cross-section at the tangency point, and the emission spectra of the coupled system at different location when pumped at 1.3 times of lasing threshold; (h)(i) optical image of single mode CQD laser integrated with a curved waveguide, and its output spectra above the lasing threshold; (j) optical image of the complex photonic integrated system above the pump threshold, which comprises CQD microring laser, MZ interferometer, Y-splitter, straight waveguides, bending waveguides, and couplers[58]
    Plasmonic waveguide integrated on-chip CQD laser. (a) Schematic of the CQD microcavity coupled with the silver nanowire; (b) optical image of the CQD microcavity coupled with a silver nanowire. The inset is the false-colored SEM image of the cross section at the tangency point; (c) emission spectra of the tangency point (black) and the two ends (red and blue) of the silver nanowire at a pump fluence above lasing threshold; (d) peak intensities and linewidths under different pump fluences[113]; (e) top-view SEM image of a spaser; (f) emission spectra of plasmons scattered at the left reflector edge and the right tip, confirming that the laser signal is guided and focused[57]
    On-chip CQD lasers fabricated by subtractive manufacturing. (a) Fabrication diagram of low loss SiN/CQD/SiN hybrid waveguide[124]; (b) diagram of vertical coupling of SiN/CQD/SiN microdisk laser and SiN waveguide; (c) optical microscopy image and false-color SEM image of cross section of waveguide coupled microdisk laser; (d) output emission of 7 μm diameter disk laser under different fs pump powers; (e) output intensity as a function of pump intensity, showing a clear threshold of 27 μJ·cm-2[102]; (f) diagram of on-chip DFB laser after EBL and RIE etching; (g) top view image and cross section image (inset) of SEM image of DFB laser; (h) spectra measured from unpatterned waveguide and DFB lasers with different grating periods; (i) input-output curve, indicating a lasing threshold around 270 μJ·cm-2[114]
    • Table 1. Complex refractive indexes of various CQD thin films

      View table

      Table 1. Complex refractive indexes of various CQD thin films

      MaterialLigand/treatmentn at band edgek at band edgen at longer wavelengthReference
      PbS (band edge 1000 nm)Oleic acid1.870.041.82@1550 nm51
      PbS (band edge 1200 nm)1.980.051.91@1550 nm
      PbS (band edge 1550 nm)2.060.042.04@1550 nm
      PbS (band edge 1200 nm)EDT2.370.112.21@1550 nm
      PbS (band edge 1200 nm)NH4I2.770.212.51@1550 nm
      CdSe with 3.6 nm diameterOleic acid1.730.051.7@1000 nm56
      NH4SCN1.940.0921.8@1000 nm
      250 ℃ annealed2.300.132.1@1000 nm
      CdSe/Cd0.25Zn0.75S core/shell CQWsSelf-assembled1.950.051.95@650 nm62
      Spin coated1.801.80@650 nm
      CdSe/2CdS CQDSpin coated1.950.081.84@ 800 nm50
      CdSe/4CdS CQD1.870.031.81@800 nm
      CdSe/6CdS CQD1.840.031.78@800 nm
      CdSe/CdS/ZnS CQDCl-1.97 at 630 nm52
      Oleic acid, oleylamine1.74 at 630 nm
    • Table 2. Gain characteristic parameters of several types of CQD

      View table

      Table 2. Gain characteristic parameters of several types of CQD

      MaterialGain thresholdGain lifetime /psGain coefficient /cm-1Pump conditionMethodReference
      CdSe CQDN¯=1.4510100 fs, 413 nm, 1 kHzTA65
      CdSe/CdZnSe/ZnSeS/ZnS CQDN¯=1780110 fs, 344 nmVSL16
      CdSe/CdZnSe/ZnSeS CQDN¯=0.5±0.11130~200 fs, 515 nm,500 HzTA73
      PbS CQD410 μJ·cm-2~103300 fs, 1030 nm, 50 kHzVSL75
      PbS/PbSSe CQD300 μJ·cm-2280~2180±180300 fs, 1030 nm, 10 kHzVSL69
      CdSe NPLN¯=4.1±0.51001.000×105110 fs, 1 kHzTA74
      CdSe/CdS NPL41 μJ·cm-2650.0120 fs, 400 nm, 1 kHzVSL76
      CdSe NPL25 μJ·cm-21.500×104110 fs, 400 nm, 1 kHzTA77
    • Table 3. Performance of waveguide integrated CQD photodetectors

      View table

      Table 3. Performance of waveguide integrated CQD photodetectors

      WaveguidestructureCQDDevicestructureWavelength /μmResponsivity /(A·W-1EQE /%Devicesize /μm23 dB bandwidth /MHzReference
      Si-MIMHgTePC2.30.02315×0.350.01109
      SiPbSPD2.11.374.8660001.1111
      SiNPbSPD0.6356.00112
      SiNPbSPD1.2750.6967.56000110
    • Table 4. Structures and performance of waveguide integrated CQD lasers

      View table

      Table 4. Structures and performance of waveguide integrated CQD lasers

      CQDCavityWaveguideThreshold /(μJ/cm2)Pump conditionReference
      CdSe/ZnSMicroplatesCQD210-33020 ps, 430 nm, 1 kHz[115]
      CdSxSe1-x/ZnSSupraparticleSU-862000.76 ns, 532 nm, 7.1 kHz[121]
      CdZnS/ZnSMicro ringCQD6.9~4 ns, 355 nm[101]
      CdSe/ZnSMicro ringCQD10020 ps, 430 nm, 1 kHz[58]
      CdSe/ZnSMicro ringAg nanowire14720 ps, 430 nm, 1 kHz[113]
      CdSe/CdS/ZnSPlasmonic Fabry-PerotTapered Ag waveguide100340 fs, 450 nm, 1 kHz[57]
      CdSe/CdSMicrodiskSiN2710 ps, 400 nm, 1 kHz[102]
      CdSe/CdSDistributed feedbackSiN2707 ns, 532 nm, 938 Hz[114]
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    Junling Qu, Peng Liu, Xuetao Gan, Jianlin Zhao. Silicon Photoelectron Chip Integrated Active Devices Based on Colloidal Quantum Dots (Invited)[J]. Acta Optica Sinica, 2024, 44(15): 1513011

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    Paper Information

    Category: Integrated Optics

    Received: Jun. 2, 2024

    Accepted: Jul. 11, 2024

    Published Online: Aug. 5, 2024

    The Author Email: Xuetao Gan (xuetaogan@nwpu.edu.cn)

    DOI:10.3788/AOS241121

    CSTR:32393.14.AOS241121

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