Acta Optica Sinica, Volume. 44, Issue 15, 1513011(2024)
Silicon Photoelectron Chip Integrated Active Devices Based on Colloidal Quantum Dots (Invited)
Fig. 1. Solution-based synthesis of CQDs and their assembly into semiconductor optoelectronic thin films. (a) Hot-injection synthesis of CQD; (b) diagram of typical structure of single CQD with inorganic quantum dot core and organic long-chain ligands[30]; (c) integration of CQD film to the CMOS readout circuit and its use as infrared sensor in a focal plane array[17]; (d) scanning electron microscope (SEM) cross-sectional image of a thin film made of densely packed CQDs[41]
Fig. 2. Quantum confinement size effect and heterostructure of CQD. (a) Electronic energy levels in a bulk semiconductor and spherical CQDs made of the same material but of different size[45]; (b) absorption spectra of PbS CQD with size ranging from 4.3 nm to 8.4 nm[46]; (c) band alignments of different heterostructured CQDs
Fig. 3. Applications corresponding to different bands in electromagnetic waves, transparency window of the silicon-based optoelectronic platform, and the spectrum range covered by different CQDs
Fig. 4. Complex refractive index of CQD film. Refractive indexes n and extinction coefficients k of PbS CQD films capped with (a) oleic acid, (b) 1,2-ethanedithiol (EDT), and (c) I-[51]; (d) refractive indexes and linear absorption coefficients of different-sized CdSe QD films[56]; (e) complex refractive index of self-assembled CQW film; (f) cross-sectional TEM image of the quasi-symmetric waveguide[62]
Fig. 5. Optical-gain model of CQD and the methods to measure its optical gain characteristics. In the (a) ground state, (b) single-exciton state, and (c) biexciton state, the CQD absorbs, transmits or magnifies an incident photon[67]; (d)(e) TA measurement[68] and (f)(g) VSL measurement[69] of CQD optical gain characteristics
Fig. 6. Diagrams of ligand exchange process[82]. (a) Solid state ligand exchange; (b) phase transfer ligand exchange
Fig. 9. Plasmonic waveguide-integrated CQD photodetector[109]. (a) Schematic of the plasmonic-silicon hybrid waveguide system. The arrows show the light propagation direction. Inset is the cross-section of the MIM waveguide coated with HgTe CQD; (b) the schematic of the cross-section of HgTe CQD-coated MIM waveguide and the simulated electric field distribution; SEM images of (c) the TE apodized silicon grating coupler and (d) photoconductive detector region after depositing CQD; (e) I-V curves under dark conditions and different light input powers at 2.3 µm; (f) net photocurrent and responsivity as functions of input light power under 2 V bias
Fig. 10. SiN waveguide-integrated CQD photodiode detector[110]. (a) Device structure of waveguide coupled PbS CQD photodiode; (b) photon-generated carrier concentration distribution on PbS-PbI2 absorption layer of the evanescent coupled photodiode; (c) I-V curves of photodiode under dark conditions and illumination at 1275 nm; (d) top view of the integrated spectrometer with a CQD photodiode array and arrayed waveguide grating. Light is injected from the right grating coupler; (e) normalized photocurrent of eight channels under zero bias
Fig. 11. Waveguide-integrated CQD LEDs[112]. (a) Top-view of the device layout, with the dashed line indicating the location of the cross-section; (b) high-resolution SEM of a focused ion beam (FIB) cross-section; (c) optical microscope image of the sample; (d) band-alignment of the LED; (e) photoluminescence and electroluminescence spectra of CQD; (f) output optical power in a single-mode waveguide varying with LED current
Fig. 12. On-chip integration of self-assembled CQD lasers. (a) Water droplet induced CQD film splitting process; (b) optical image of the CQD microplate and the grating coupling waveguide; (c) the emission spectrum from the CQD microplate laser (P1) and the scattered spectrum from the waveguide (P2)[115]; (d) illustration of the CQD emulsion droplets nucleating into superparticle; (e) microscope and (f) CCD image of superparticle located beside the SU8 waveguide[121]
Fig. 13. Template-assisted on-chip CQD lasers. (a) Laplace pressure balances the pinning force of CQD and substrate, allowing for continuous moving of liquid front and regulated CQDs assembly; (b)(c) SEM image and the emission spectra above lasing threshold of the microring-waveguide coupling system fabricated by method in Fig. 13(a)[101]; (d)-(g) EBL-assisted fabrication process of CQD microcavity and waveguide, the optical image and the false-colored SEM image of the cross-section at the tangency point, and the emission spectra of the coupled system at different location when pumped at 1.3 times of lasing threshold; (h)(i) optical image of single mode CQD laser integrated with a curved waveguide, and its output spectra above the lasing threshold; (j) optical image of the complex photonic integrated system above the pump threshold, which comprises CQD microring laser, MZ interferometer, Y-splitter, straight waveguides, bending waveguides, and couplers[58]
Fig. 14. Plasmonic waveguide integrated on-chip CQD laser. (a) Schematic of the CQD microcavity coupled with the silver nanowire; (b) optical image of the CQD microcavity coupled with a silver nanowire. The inset is the false-colored SEM image of the cross section at the tangency point; (c) emission spectra of the tangency point (black) and the two ends (red and blue) of the silver nanowire at a pump fluence above lasing threshold; (d) peak intensities and linewidths under different pump fluences[113]; (e) top-view SEM image of a spaser; (f) emission spectra of plasmons scattered at the left reflector edge and the right tip, confirming that the laser signal is guided and focused[57]
Fig. 15. On-chip CQD lasers fabricated by subtractive manufacturing. (a) Fabrication diagram of low loss SiN/CQD/SiN hybrid waveguide[124]; (b) diagram of vertical coupling of SiN/CQD/SiN microdisk laser and SiN waveguide; (c) optical microscopy image and false-color SEM image of cross section of waveguide coupled microdisk laser; (d) output emission of 7 μm diameter disk laser under different fs pump powers; (e) output intensity as a function of pump intensity, showing a clear threshold of 27 μJ·cm-2[102]; (f) diagram of on-chip DFB laser after EBL and RIE etching; (g) top view image and cross section image (inset) of SEM image of DFB laser; (h) spectra measured from unpatterned waveguide and DFB lasers with different grating periods; (i) input-output curve, indicating a lasing threshold around 270 μJ·cm-2[114]
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Junling Qu, Peng Liu, Xuetao Gan, Jianlin Zhao. Silicon Photoelectron Chip Integrated Active Devices Based on Colloidal Quantum Dots (Invited)[J]. Acta Optica Sinica, 2024, 44(15): 1513011
Category: Integrated Optics
Received: Jun. 2, 2024
Accepted: Jul. 11, 2024
Published Online: Aug. 5, 2024
The Author Email: Xuetao Gan (xuetaogan@nwpu.edu.cn)
CSTR:32393.14.AOS241121