Chinese Journal of Lasers, Volume. 51, Issue 7, 0701009(2024)

Advanced Applications for Capillary Discharge 46.9 nm Extreme Ultraviolet Laser

Huaiyu Cui1,2, Yujie Shen1, Dongdi Zhao1, Bo An1, and Yongpeng Zhao1,2、*
Author Affiliations
  • 1Department of Opto-Electronic Information Science and Technology, Harbin Institute of Technology, Harbin 150080, Heilongjiang, China
  • 2National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Harbin 150080, Heilongjiang, China
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    Figures & Tables(29)
    46.9 nm laser ablation on brass surface[40]
    ZEMAX software simulation and Si surface ablation results of a 46.9 nm laser focused by a cylindrical mirror[42]
    Toroidal mirror focused 46.9 nm laser ablation formed on the Si surface[43]
    Ablation hole with the diameter of 82 nm obtained at 7 μm from the focal plane of FZP[45]
    Schematic diagram of the wavefront splitting achieved by the Loe mirror[46]
    Nanopits and nanodots based on interferometric etching[47]. (a) Nanopits; (b) nanodots
    Schematic diagram of the tubular optical element[49]
    Focused interference etching by 46.9 nm laser[49]
    Periodic image self-healing based on Talbot effect[50]. (a) Mask; (b) etched result
    Ablation rate of the three kinds of materials by 46.9 nm laser at different fluences and pulse numbers[54]
    Schematic diagram of Faraday cup detection of 46.9 nm laser-induced plasma[53]
    Electronic signals detected by Faraday cup[53]
    Schematic representation of a Langmuir probe detecting 46.9 nm laser-induced plasma[63]
    Nanoparticles generated by monolayer graphene-assisted 46.9 nm laser irradiation[71]. (a) Cross-section depth; (b) ablation of the bare glass substrate; (c) graphene-assisted ablation of the glass substrate
    LIPSS formed by 46.9 nm laser in the ablated region of PMMA[72]. (a) Two-dimensional ablation pattern; (b) three-dimensional ablation pattern
    LIPSS-II formed by 46.9 nm laser in the ablated region of PMMA[73]
    LIPPS induced by single- and multi-shot 46.9 nm laser pulses in the BaF2 ablation region[74]. (a) Ablation induce by single laser pulse; (b) ablation induced by multiple pulses laser
    Periodic structural morphology at the boundary of the BaF2 ablation region[75]. (a) Ablation area; (b) edge of the ablation area
    Relationship between the period of micro-nano structures formed within the BaF2 ablation region and laser energy density[76]. (a) 230 mJ/cm2; (b) 30 mJ/cm2; (c) 15 mJ/cm2
    Schematic diagram of the 46.9 nm laser mass spectrometer[79]
    High-resolution three-dimensional mass spectrometry imaging achieved by 46.9 nm laser mass spectrometer[80]. (a) m/z=70.1; (b) m/z=81.1; (c) confocal microscopy image of the sample
    Radiation dose of 46.9 nm laser in relation to SSB and DSB yields of DNA molecules[87].(a) Radiation dose in relation to SSB yield; (b) radiation dose in relation to DSB yield
    46.9 nm laser Gabor holographic device diagram and side view[89]
    Schematic diagram of 46.9 nm laser Fourier transform holographic imaging device[91]
    Schematic diagram of 46.9 nm laser diffraction microscope device[92]
    Diffraction patterns and reconstructed images before and after correction[92]
    Schematic diagram of 46.9 nm laser full-field microscope device[93]
    Nano tip single shot image and oscillation in the period[93]
    • Table 1. Decay depth of 46.9 nm and 157 nm laser in PTFE, PMMA and PI and the ablation rate of the three kinds of materials[54]

      View table

      Table 1. Decay depth of 46.9 nm and 157 nm laser in PTFE, PMMA and PI and the ablation rate of the three kinds of materials[54]

      Polymer

      Ablation ration /

      (nm/pulse)

      Attenuation

      length /nm

      46.9 nm

      ϕ≈1 J/cm2

      157 nm

      ϕ≈300 mJ/cm2

      46.9 nm157 nm
      PTFE8337012172
      PMMA8726019117
      PI881501679
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    Huaiyu Cui, Yujie Shen, Dongdi Zhao, Bo An, Yongpeng Zhao. Advanced Applications for Capillary Discharge 46.9 nm Extreme Ultraviolet Laser[J]. Chinese Journal of Lasers, 2024, 51(7): 0701009

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    Paper Information

    Category: laser devices and laser physics

    Received: May. 29, 2023

    Accepted: Aug. 11, 2023

    Published Online: Apr. 2, 2024

    The Author Email: Zhao Yongpeng (zhaoyp3@hit.edu.cn)

    DOI:10.3788/CJL230867

    CSTR:32183.14.CJL230867

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