Chinese Journal of Lasers, Volume. 51, Issue 7, 0701009(2024)
Advanced Applications for Capillary Discharge 46.9 nm Extreme Ultraviolet Laser
Fig. 2. ZEMAX software simulation and Si surface ablation results of a 46.9 nm laser focused by a cylindrical mirror[42]
Fig. 3. Toroidal mirror focused 46.9 nm laser ablation formed on the Si surface[43]
Fig. 4. Ablation hole with the diameter of 82 nm obtained at 7 μm from the focal plane of FZP[45]
Fig. 5. Schematic diagram of the wavefront splitting achieved by the Loe mirror[46]
Fig. 6. Nanopits and nanodots based on interferometric etching[47]. (a) Nanopits; (b) nanodots
Fig. 9. Periodic image self-healing based on Talbot effect[50]. (a) Mask; (b) etched result
Fig. 10. Ablation rate of the three kinds of materials by 46.9 nm laser at different fluences and pulse numbers[54]
Fig. 11. Schematic diagram of Faraday cup detection of 46.9 nm laser-induced plasma[53]
Fig. 13. Schematic representation of a Langmuir probe detecting 46.9 nm laser-induced plasma[63]
Fig. 14. Nanoparticles generated by monolayer graphene-assisted 46.9 nm laser irradiation[71]. (a) Cross-section depth; (b) ablation of the bare glass substrate; (c) graphene-assisted ablation of the glass substrate
Fig. 15. LIPSS formed by 46.9 nm laser in the ablated region of PMMA[72]. (a) Two-dimensional ablation pattern; (b) three-dimensional ablation pattern
Fig. 17. LIPPS induced by single- and multi-shot 46.9 nm laser pulses in the BaF2 ablation region[74]. (a) Ablation induce by single laser pulse; (b) ablation induced by multiple pulses laser
Fig. 18. Periodic structural morphology at the boundary of the BaF2 ablation region[75]. (a) Ablation area; (b) edge of the ablation area
Fig. 19. Relationship between the period of micro-nano structures formed within the BaF2 ablation region and laser energy density[76]. (a) 230 mJ/cm2; (b) 30 mJ/cm2; (c) 15 mJ/cm2
Fig. 21. High-resolution three-dimensional mass spectrometry imaging achieved by 46.9 nm laser mass spectrometer[80]. (a) m/z=70.1; (b) m/z=81.1; (c) confocal microscopy image of the sample
Fig. 22. Radiation dose of 46.9 nm laser in relation to SSB and DSB yields of DNA molecules[87].(a) Radiation dose in relation to SSB yield; (b) radiation dose in relation to DSB yield
Fig. 24. Schematic diagram of 46.9 nm laser Fourier transform holographic imaging device[91]
Fig. 26. Diffraction patterns and reconstructed images before and after correction[92]
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Huaiyu Cui, Yujie Shen, Dongdi Zhao, Bo An, Yongpeng Zhao. Advanced Applications for Capillary Discharge 46.9 nm Extreme Ultraviolet Laser[J]. Chinese Journal of Lasers, 2024, 51(7): 0701009
Category: laser devices and laser physics
Received: May. 29, 2023
Accepted: Aug. 11, 2023
Published Online: Apr. 2, 2024
The Author Email: Zhao Yongpeng (zhaoyp3@hit.edu.cn)
CSTR:32183.14.CJL230867