Chinese Optics, Volume. 18, Issue 3, 452(2025)

Fiber-optic Fabry Perot pressure sensor for shock wave measurements based on silicon MEMS

Jian-xiong YIN, Jun WANG, Hao-xing WANG, Shun WAN, Jia LIU, and Ping-gang JIA*
Author Affiliations
  • State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China
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    References(21)

    [4] SHI Y CH, KONG D R, XU CH D. Status analysis of shock wave pressure measurement and sensor technology in explosion field[J]. Measurement & Control Technology, 41, 1-10,34(2022).

    [7] FU Y W, WANG R N, TANG W T. MEMS silicon-glass fiber-optic FP pressure sensor for high-pressure measurements[J]. Chinese Optics, 17, 771-779(2024).

    [9] PARKES W, DJAKOV V, BARTON J S et al. Design and fabrication of dielectric diaphragm pressure sensors for applications to shock wave measurement in air[J]. Journal of Micromechanics and Microengineering, 17, 1334-1342(2008).

    [11] CHEN X, YU SH J, ZHOU H J. Design of a F-P optical fiber explosion pressure sensor[J]. Transducer and Microsystem Technologies, 37, 99-101,105(2018).

    [16] [16] DI GIOVANNI M. Flat Crugated Diaphragm Design Hbook[M]. New Yk: Routledge, 2017.

    [20] YANG F, KONG D R, JIANG B. Dynamic characteristic of shock wave pressure sensor based on shock tube calibration[J]. Journal of Nanjing University of Science and Technology, 41, 330-336(2017).

    [21] TIAN R, WEI G, ZHANG H ZH. Study of the blast resistance of GFRP laminates based on air shock tube[J]. Composites Science and Engineering, 68-75(2023).

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    Jian-xiong YIN, Jun WANG, Hao-xing WANG, Shun WAN, Jia LIU, Ping-gang JIA. Fiber-optic Fabry Perot pressure sensor for shock wave measurements based on silicon MEMS[J]. Chinese Optics, 2025, 18(3): 452

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    Paper Information

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    Received: Jan. 14, 2025

    Accepted: --

    Published Online: Jun. 16, 2025

    The Author Email:

    DOI:10.37188/CO.2025-0010

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