Chinese Optics, Volume. 18, Issue 3, 452(2025)

Fiber-optic Fabry Perot pressure sensor for shock wave measurements based on silicon MEMS

Jian-xiong YIN, Jun WANG, Hao-xing WANG, Shun WAN, Jia LIU, and Ping-gang JIA*
Author Affiliations
  • State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China
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    Figures & Tables(11)
    Structural diagram of optical fiber F-P pressure sensor
    Numerical simulation of the relationship between diaphragm size and eigenfrequency and sensitivity
    Process flow diagram for pressure sensor production
    Integration and packaging of sensor’s sensitive units
    Schematic diagram of static pressure testing
    Sensor’s static pressure test results
    Schematic diagram of three-wavelength dynamic demodulation system
    Schematic diagram of the shock tube test
    Verification results of shock wave cross section at different pressures
    Fiber optic sensor and piezoelectric sensor output curves
    • Table 1. Structural parameters of the pressure sensor

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      Table 1. Structural parameters of the pressure sensor

      PerformanceValue
      Diaphragm radius r/mm0.8
      Diaphragm thickness h/mm0.245
      Measurement range P/MPa0~10
      Sensitivity S/nm·MPa−1113
      Natural frequency f/MHz1.39
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    Jian-xiong YIN, Jun WANG, Hao-xing WANG, Shun WAN, Jia LIU, Ping-gang JIA. Fiber-optic Fabry Perot pressure sensor for shock wave measurements based on silicon MEMS[J]. Chinese Optics, 2025, 18(3): 452

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    Paper Information

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    Received: Jan. 14, 2025

    Accepted: --

    Published Online: Jun. 16, 2025

    The Author Email:

    DOI:10.37188/CO.2025-0010

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