Chinese Optics, Volume. 18, Issue 3, 452(2025)
Fiber-optic Fabry Perot pressure sensor for shock wave measurements based on silicon MEMS
Fig. 2. Numerical simulation of the relationship between diaphragm size and eigenfrequency and sensitivity
Fig. 7. Schematic diagram of three-wavelength dynamic demodulation system
Fig. 9. Verification results of shock wave cross section at different pressures
Fig. 10. Fiber optic sensor and piezoelectric sensor output curves
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Jian-xiong YIN, Jun WANG, Hao-xing WANG, Shun WAN, Jia LIU, Ping-gang JIA. Fiber-optic Fabry Perot pressure sensor for shock wave measurements based on silicon MEMS[J]. Chinese Optics, 2025, 18(3): 452
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Received: Jan. 14, 2025
Accepted: --
Published Online: Jun. 16, 2025
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