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Chinese Journal of Lasers, Volume. 44, Issue 9, 905002(2017)

Design of Spot Size and Optical Path in Scanning Beam Interference Lithography System

Wang Wei1,2、*, Jiang Shan1, Song Ying1, and Bayanheshig1
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  • 1[in Chinese]
  • 2[in Chinese]
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    Article index updated: Mar. 11, 2025

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    Wang Wei, Jiang Shan, Song Ying, Bayanheshig. Design of Spot Size and Optical Path in Scanning Beam Interference Lithography System[J]. Chinese Journal of Lasers, 2017, 44(9): 905002

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    Paper Information

    Category: beam transmission and control

    Received: Mar. 23, 2017

    Accepted: --

    Published Online: Sep. 7, 2017

    The Author Email: Wei Wang (wayne_lzu@163.com)

    DOI:10.3788/CJL201744.0905002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology