Meniscus and Spin Coating Methods for Coating SiO<sub>2</sub> Sol-Gel Antireflective Film on Beam Sampling Grating

Ming Wang; Yanchang Zheng; Zhengkun Liu; Xinpu Wu; Zhiwen Chen; Hai Wang; Yilin Hong

doi:10.3788/LOP202259.0105001

Laser & Optoelectronics Progress, Volume. 59, Issue 1, 0105001(2022)

Meniscus and Spin Coating Methods for Coating SiO₂ Sol-Gel Antireflective Film on Beam Sampling Grating

Ming Wang¹, Yanchang Zheng^2、*, Zhengkun Liu², Xinpu Wu², Zhiwen Chen², Hai Wang¹, and Yilin Hong²

Author Affiliations

¹School of Mechanical Engineering, Anhui Polytechnic University, Wuhu , Anhui 241000, China

²National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei , Anhui 230029, China

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Figures & Tables(11)

Fig. 1. Schematic of meniscus coating

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Fig. 2. Schematic of spin coating

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Fig. 3. Microscope images of grating surface after coating. (a) Meniscus coating; (b) spin coating

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Fig. 4. Profiler images of grating surface after coating. (a) Profiler image after meniscus coating; (b) profiler image after spin coating

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Fig. 5. AFM images of grating surface before and after coating. (a) AFM image before coating; (b) AFM image after meniscus coating; (c) AFM image after spin coating

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Fig. 6. Structure schematic of the grating surface coated with sol-gel film

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$Diffraction efficiency versus film thickness$

Fig. 7. Diffraction efficiency versus film thickness

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$Schematic of measuring diffraction efficiency$

Fig. 8. Schematic of measuring diffraction efficiency

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$Optical path of measuring diffraction efficiency$

Fig. 9. Optical path of measuring diffraction efficiency

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Table 1. Film thickness obtained by multiple meniscus coating and spin coating
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Table 1. Film thickness obtained by multiple meniscus coating and spin coating
Item Number 1 2 3 4
Meniscus coating Average thickness /nm 238.07 230.79 233.57 236.54
RMSD /nm 3.57 3.46 3.50 3.55
Spin coating Average thickness /nm 235.21 253.46 271.35 229.73
RMSD /nm 5.41 8.87 22.25 10.57

Table 2. Effect of coating sol-gel antireflective film on diffraction efficiency of BSG

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Table 2. Effect of coating sol-gel antireflective film on diffraction efficiency of BSG

Sample number	Measurand	Zero-order diffraction efficiency /%			-1st-order diffraction efficiency /%
Sample number	Measurand	Before coating	After meniscus coating	After spin coating	Before coating	After meniscus coating	After spin coating
#1	Average	91.45	95.28	94.75	0.67	0.32	0.30
#1	RSD	0.35	0.33	0.54	9.14	8.53	9.52
#2	Average	91.43	95.23	94.28	0.7	0.31	0.28
#2	RSD	0.26	0.21	0.51	7.89	5.08	8.06
#3	Average	91.23	94.93	93.35	0.68	0.32	0.30
#3	RSD	0.28	0.20	0.43	4.92	4.35	5.34
#4	Average	90.94	94.69	94.25	0.72	0.37	0.35
#4	RSD	0.38	0.35	0.46	4.47	4.24	5.28

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Ming Wang, Yanchang Zheng, Zhengkun Liu, Xinpu Wu, Zhiwen Chen, Hai Wang, Yilin Hong. Meniscus and Spin Coating Methods for Coating SiO₂ Sol-Gel Antireflective Film on Beam Sampling Grating[J]. Laser & Optoelectronics Progress, 2022, 59(1): 0105001

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