Meniscus and Spin Coating Methods for Coating SiO<sub>2</sub> Sol-Gel Antireflective Film on Beam Sampling Grating

Ming Wang; Yanchang Zheng; Zhengkun Liu; Xinpu Wu; Zhiwen Chen; Hai Wang; Yilin Hong

doi:10.3788/LOP202259.0105001

Laser & Optoelectronics Progress, Volume. 59, Issue 1, 0105001(2022)

Meniscus and Spin Coating Methods for Coating SiO₂ Sol-Gel Antireflective Film on Beam Sampling Grating

Ming Wang¹, Yanchang Zheng^2、*, Zhengkun Liu², Xinpu Wu², Zhiwen Chen², Hai Wang¹, and Yilin Hong²

Author Affiliations

¹School of Mechanical Engineering, Anhui Polytechnic University, Wuhu , Anhui 241000, China

²National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei , Anhui 230029, China

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Ming Wang, Yanchang Zheng, Zhengkun Liu, Xinpu Wu, Zhiwen Chen, Hai Wang, Yilin Hong. Meniscus and Spin Coating Methods for Coating SiO₂ Sol-Gel Antireflective Film on Beam Sampling Grating[J]. Laser & Optoelectronics Progress, 2022, 59(1): 0105001

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Paper Information

Category: Diffraction and Gratings

Received: Mar. 31, 2021

Accepted: May. 7, 2021

Published Online: Dec. 23, 2021

The Author Email: Yanchang Zheng (yczheng@mail.ustc.edu.cn)

DOI:10.3788/LOP202259.0105001

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology