Chinese Journal of Lasers, Volume. 36, Issue 11, 3064(2009)

Study of Laser Cutting Technology for Silicon Wafer under Water

Yang Wei1、*, Peng Xinhan2, and Zhang Jun1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(10)

    [1] [1] Reinhart Poprawe.Lasertechnik für die Fertigung:Grundlagen,Perspektiven und Beispiele für den Innovativen Lngenieur[M]. Zhang Dongyun Transl.,Beijing:Tsinghua University Press,2008. 279-283

    [4] [4] Zhu Bo,Qi Litao,Wang Yang. The experimental study of water-assisted laser machining[J]. Modern Manufacturing Engineering,2003,(12):73-74

    [5] [5] Long Yuhong,Xiong Liangcai,Shi Tielin. Experimental research of micromachining silicon by excimer laser ablation in air and under water[J]. Laser Technol.,2006,30(6):567-569

    [7] [7] Zhou Bingkun,Gao Yizhi,Chen Tirong et al.. Laser Principle[M].Beijing:National Defense Industry Press,2004. 64-73

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    Paper Information

    Category: laser manufacturing

    Received: Jan. 9, 2009

    Accepted: --

    Published Online: Nov. 11, 2009

    The Author Email: Wei Yang (ywwestlife@163.com)

    DOI:10.3788/cjl20093611.3064

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