Chinese Journal of Lasers, Volume. 36, Issue 11, 3064(2009)

Study of Laser Cutting Technology for Silicon Wafer under Water

Yang Wei1、*, Peng Xinhan2, and Zhang Jun1
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  • 1[in Chinese]
  • 2[in Chinese]
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    Yang Wei, Peng Xinhan, Zhang Jun. Study of Laser Cutting Technology for Silicon Wafer under Water[J]. Chinese Journal of Lasers, 2009, 36(11): 3064

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    Paper Information

    Category: laser manufacturing

    Received: Jan. 9, 2009

    Accepted: --

    Published Online: Nov. 11, 2009

    The Author Email: Wei Yang (ywwestlife@163.com)

    DOI:10.3788/cjl20093611.3064

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