Chinese Optics Letters, Volume. 9, Issue 5, 052201(2011)
Optical design for EUV lithography source collector
Wolter I collector is the best collector for extreme ultraviolet (EUV) lithography, which has a series of nested mirrors. It has high collection efficiency and can obtain more uniform intensity distribution at the intermediate focus (IF). A new design with the calculation sequence from the outer mirror to the inner one on the premise of satisfying the requirements of the collector is introduced. Based on this concept, a computer program is established and the optical parameters of the collector using the program is calculated. The design results indicate that the collector satisfies all the requirements.
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Shuqing Zhang, Qi Wang, Dongyuan Zhu, Runshun Li, Chang Liu, "Optical design for EUV lithography source collector," Chin. Opt. Lett. 9, 052201 (2011)
Category: Optical Design and Fabrication
Received: Nov. 10, 2010
Accepted: Dec. 17, 2010
Published Online: Apr. 22, 2011
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