Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Chinese Journal of Lasers, Volume. 33, Issue 12, 1688(2006)

Study of Silicon Micro-Structuring Using Ultra-Short Laser Pulses

[in Chinese]1、*, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]2, and [in Chinese]2,3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
    • show less
    AbstractGet PDF(in Chinese)
    Figures&Tables (0)
    Equations (0)
    References (5)
    Tools
    Paper Information
    Topics
    References(5)

    [5] [5] Zhao Ming, Yin Gang, Zhu Jingtao et al.. Picosecond pulse laser microstructuring of silicon [J]. Chin. Phys. Lett., 2003, 20(10):1789～1892

    [6] [6] Tsinghua Her, Richard J. Finlay, Claudia Wu et al.. Microstructuring of silicon with femtosecond laser pulses [J]. Appl. Phys. Lett., 1998, 73:1673～1675

    [7] [7] C. Wu, C. H. Croch, L. Zhao et al.. Visible luminescence from silicon surfaces microstructured in air [J]. Appl. Phys. Lett., 2002, 81(11):1999～2002

    [9] [9] J. R. Goldman, J. A. Prybyla. Ultrafast dynamics of laser-excited electron distributions in silicon [J]. Phys. Rev. Lett., 1994, 72(9):1364～1367

    [12] [12] Xiaofeng Wang, Tianqing Jia, Xiaoxi Li et al.. Ablation and ultrafast dynamics of zinc selenide under femtosecond laser irradiation [J]. Chin. Opt. Lett., 2005, 3(10):615～617

    CLP Journals

    [1] Xiao Jing, He Hengxiang, Xia Huijun, Jia Jing. Temperature Flied Simulation on Aluminium Alloy Irradiated by Long Pulsed Laser and Continuous Wave Laser[J]. Chinese Journal of Lasers, 2012, 39(11): 1103002

    [2] Liu Yang, Yu Jin, Zhang Xue, Mo Zeqiang, Nie Shuzhen, Huang Yutao, Fan Zhongwei, Chen Bo. Investigation and Application of Coaxial Output Three-Wavelength Picosecond Laser Micro-Machining System[J]. Laser & Optoelectronics Progress, 2013, 50(5): 51402

    [3] [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], Peter Zeppenfeld. Si Microstructure Fabricated by 355 nm Nanosecond Pulsed Laser and Its Fluorescence Microscopy Study[J]. Chinese Journal of Lasers, 2010, 37(8): 2139

    [4] Luo Yao, Pang Shengyong, Zhou Jianxin, Li Huaixue. Numerical Simulation of Recast Layer Formation in Nanosecond Pulse Laser Drilling on Nickel-Based High-Temperature Alloy[J]. Chinese Journal of Lasers, 2014, 41(4): 403007

    [5] Lü Xiaozhan, Ji Lingfei, Wu Yan, Lin Zhenyuan, Yan Yinzhou. Fabrication of High Performance Anti-Reflection Silicon Surface by Picosecond Laser Scanning Irradiation with Chemical Corrosion[J]. Chinese Journal of Lasers, 2015, 42(4): 403006

    [6] Liu Kui, Feng Guoying, Deng Guoliang, Li Wei. Difference in Microstructures Induced by Femtosecond Laser Scanning on Silicon Surface at Different Temperatures[J]. Chinese Journal of Lasers, 2012, 39(8): 803003

    [7] Wang Xiyuan, Huang Yongguang, Liu Dewei, Zhu Xiaoning, Wang Baojun, Zhu Hongliang. Fabrication of Tellurium Doped Silicon Detector by Femtosecond Laser and Excimer Laser[J]. Chinese Journal of Lasers, 2013, 40(3): 302001

    [8] Gao Shengmiao, Han Peigao, Yan Kezhu. Research Progress of Femtosecond Laser Fabricating Silicon-Based Micro/Nano Structure[J]. Laser & Optoelectronics Progress, 2013, 50(11): 110002

    [9] Zhang Rongtao, Xu Li, Wu Keyue. Emission of Low-Dimensional Structures Formed by Femtosecond Laser Interaction with Semiconductor[J]. Acta Optica Sinica, 2009, 29(3): 743

    [10] Lin Zhenyuan, Ji Lingfei, Wu Yan, Lü Xiaozhan, Jiang Yijian. Sub-Micron-Structure Array on Silicon Surface Fabricated by Dielectric Microsphere Assisted Laser Irradiation Followed by Chemical Etching[J]. Chinese Journal of Lasers, 2016, 43(6): 602008

    [11] Tang Wanyi, Zhou Ming, Ren Naifei, Li Baojia, Zhang Wei. Surface Morphology and Optical Absorption of Femtosecond Laser Microstructured Silicon Coated with AZO Flim[J]. Chinese Journal of Lasers, 2011, 38(12): 1207001

    [12] Du Lingyan, Wu Zhiming, Hu Zhen, Jiang Yadong. Progress in Fabrication and Application of Doping Black Silicon by Femtosecond Laser[J]. Laser & Optoelectronics Progress, 2015, 52(10): 100005

    Tools

    Get Citation

    Copy Citation Text

    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study of Silicon Micro-Structuring Using Ultra-Short Laser Pulses[J]. Chinese Journal of Lasers, 2006, 33(12): 1688

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category: laser manufacturing

    Received: Jun. 5, 2006

    Accepted: --

    Published Online: Dec. 30, 2006

    The Author Email: (liping@nim.ac.cn)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology