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Chinese Journal of Lasers, Volume. 33, Issue 12, 1688(2006)

Study of Silicon Micro-Structuring Using Ultra-Short Laser Pulses

[in Chinese]1、*, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]2, and [in Chinese]2,3
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study of Silicon Micro-Structuring Using Ultra-Short Laser Pulses[J]. Chinese Journal of Lasers, 2006, 33(12): 1688

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    Paper Information

    Category: laser manufacturing

    Received: Jun. 5, 2006

    Accepted: --

    Published Online: Dec. 30, 2006

    The Author Email: (liping@nim.ac.cn)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology