Chinese Journal of Lasers, Volume. 33, Issue 12, 1688(2006)

Study of Silicon Micro-Structuring Using Ultra-Short Laser Pulses

[in Chinese]1、*, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]2, and [in Chinese]2,3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • show less

    The new material “black silicon” formed by arrays of sharp conical spikes on the silicon surface is fabricated under the cumulative ultra-short laser pulses irradiation in different ambient atmospheres. The physical mechanisms of conical spikes evolutions impacting silicon surface under picosecond (ps) and femtosecond (fs) laser irradiations are different. The formation of spikes arrays depends on the pulse duration and ambient atmosphere. Especially, in SF6 ambient atmosphere, silicon surface micro-structuring evolutions under ps and fs laser irradiations are analyzed in detail. Under the ps laser irradiation, silicon surface is melted before the spike arrays formed; while under the fs laser irradiation, the formation of spike array does not go through the liquid phase. The preliminary experiment shows that the infrared radiation absorptance is more than 80% at the wavelength range of 1.5~16 μm.

    Tools

    Get Citation

    Copy Citation Text

    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study of Silicon Micro-Structuring Using Ultra-Short Laser Pulses[J]. Chinese Journal of Lasers, 2006, 33(12): 1688

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: laser manufacturing

    Received: Jun. 5, 2006

    Accepted: --

    Published Online: Dec. 30, 2006

    The Author Email: (liping@nim.ac.cn)

    DOI:

    Topics