Optics and Precision Engineering, Volume. 19, Issue 4, 805(2011)
Application of microlever to micromechanical silicon resonant accelerometers
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SHI Ran, JIANG Shao-dong, QIU An-ping, SU Yan. Application of microlever to micromechanical silicon resonant accelerometers[J]. Optics and Precision Engineering, 2011, 19(4): 805
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Received: Jul. 21, 2010
Accepted: --
Published Online: Jun. 14, 2011
The Author Email: SHI Ran (whatghosts@hotmail.com)
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