Acta Optica Sinica, Volume. 42, Issue 17, 1714005(2022)
High Throughput Laser Nano Direct Writing Technique
Fig. 4. Jablonski plot of PPI photoresist (Rim-P) and two writing mode (oil mode & dip-in mode)
Fig. 5. 3D hollow spot. (a) Schematic of 3D hollow spot modulated with SLM; (b) modulation module of 3D hollow spot; (c) intensity distribution of 3D hollow spot in front focal plane of objective lens; (d) linewidth corresponding to inhibition laser off or on
Fig. 6. Beam stabilization. (a) Schematic of beam stabilization module; (b) position and (c) angle drift of beam without drift control;(d) position and (e) angle drift of beam with drift control
Fig. 7. Six channels LDW. (a) Schematic of six channels LDW system; (b) CAD module corresponding to Fig. 7(a), the inset is photo of real product; (c) six channels excitation and inhibition beams generated by SLM
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Xu Liu, Cuifang Kuang. High Throughput Laser Nano Direct Writing Technique[J]. Acta Optica Sinica, 2022, 42(17): 1714005
Category: Lasers and Laser Optics
Received: Jun. 28, 2022
Accepted: Aug. 13, 2022
Published Online: Sep. 16, 2022
The Author Email: Liu Xu (liuxu@zju.edu.cn)