High Throughput Laser Nano Direct Writing Technique

Acta Optica Sinica, Volume. 42, Issue 17, 1714005(2022)

Xu Liu^1,2、* and Cuifang Kuang^1,2

Author Affiliations

¹State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, Zhejiang,China

²Zhejiang Laboratory, Hangzhou 311121, Zhejiang, China

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Xu Liu, Cuifang Kuang. High Throughput Laser Nano Direct Writing Technique[J]. Acta Optica Sinica, 2022, 42(17): 1714005

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Paper Information

Category: Lasers and Laser Optics

Received: Jun. 28, 2022

Accepted: Aug. 13, 2022

Published Online: Sep. 16, 2022

The Author Email: Liu Xu (liuxu@zju.edu.cn)

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