Chinese Journal of Lasers, Volume. 50, Issue 8, 0802402(2023)

Research Progress in Preparation Technology of Diamond Anti‑Reflection Micro‑Nano Structure

Weili Zhang1,2、*, Xiaoyang Shi1,2, Ruijin Hong1, Xingfeng Chen1,2, Cao Feng2, and Kui Yi2
Author Affiliations
  • 1School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
  • 2Thin Film Optics Laboratory, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
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    Figures & Tables(11)
    Schematic of simulated structure of “moth’s eye”
    Schematic of inverted cone-shaped simulated structure
    Raman spectrum and transmittance analysis of diamond. (a) Change of optical transmittance of CVD diamond with laser irradiation times at different energy densities (τ=220 ps, λ=539 nm)[46]; (b) Raman spectrum of laser processed diamond[48]
    Construction of diamond micro-nano structure and simulation results of transmittance[3]. (a) Diagram of diamond surface micro-nano structure; (b) calculated wavelength dependence of theoretical transmittance of untreated diamond surface and diamond surface treated by LIPSS technology with different polarization
    Evolution of diamond surface morphology with the increase of pulse time delay[59]
    SEM images of diamond subwavelength grating and transmittance curves before and after grating construction[74]. (a)-(b) A micro-nano structure designed to reduce periodicity of surface reflection grating at 10.6 μm; (c) variation of diamond transmittance with wavelength
    Effect of diamond structure on transmittance[76]. (a) Transmission spectrum of diamond after etching SWG; (b) transmission spectra at different depths
    Broad-band anti-reflection “pyramid” structure on diamond surface[77]. (a) SEM micrograph of etched structure; (b) variation of transmittance with wavelength; (c) simulation diagram of “pyramid” structure
    Micro-nano structure and transmittance change of diamond[19]. (a) Schematic of diamond micro-nano structure; (b) transmittance curves of diamond with and without micro-nano structure, and simulated transmittance curve
    • Table 1. Classification and properties of diamond[15]

      View table

      Table 1. Classification and properties of diamond[15]

      TypeMass fraction in nature

      Crystalline

      type

      ImpurityColor

      Electric resistance /

      Ω·cm)

      Ⅰa~98%Polycrystalline

      Mass fraction of nitrogen is about 2×10-3

      Nitrogen is in aggregation state

      Colorless to yellow104-1016(insulator)
      Ⅰb~0.1%Small single crystal

      Mass fraction of nitrogen and metal inclusion are

      10-4 -10-3 and 10-2-10-1,respectively

      Nitrogen is in dispersion state

      Green to brown104-1016(insulator)
      Large single crystal

      Mass fraction of nitrogen is 10-6 -10-4

      Nitrogen is in dispersion state

      Yellow104-1016(insulator)
      Ⅱa1%-2%Single crystalMass fraction of nitrogen is 10-6Colorless1016(insulator)
      Ⅱb~0Single crystal

      Mass fraction of nitrogen and boron are 10-6 and

      10-4,respectively

      Blue101-104(P type semiconductor)
    • Table 2. Preparation methods of diamond micro-nano structures and transmittance of different structures[3,18,52,74-77]

      View table

      Table 2. Preparation methods of diamond micro-nano structures and transmittance of different structures[3,18,52,74-77]

      ProcessStructure typeDepth /µmPeriod /µmB /µmTAdvantage and disadvantage
      Short pulse laser etching

      Holes,grooves and

      seams(array)

      0.59~3

      9-20

      (10.6)

      4.2%↑

      1)Precision of micro-nano structure is not high;

      2)Processed structure is large;

      3)Severe thermal effect;

      4)Surface modification;

      5)Processing is relatively simple

      0.80~4

      9-20

      (10.6)

      4.5%↑
      Grating structure≥310.610%↑
      Ultrashort pulse laser etching

      Periodic nanostructure composed of alternating

      peaks and valleys

      ~0.12~0.41.2-2(1.25)

      ≥92%

      (~100%)

      1)Size and period of micro-nano structure can be simply controlled;

      2)Surface modification;

      3)Cold working technology

      Ion etchingSWG1.8~410.6

      10.3%↑(single side);

      26%↑(double-side)

      1)Shape of micro-nano structure is relatively well controlled;

      2)Combined with various masks;

      3)Preparation cost is high;

      4)It needs to be combined with theoretical calculation

      13.7;

      2

      ~4.6;

      ~4

      11-13.5

      ~93%;

      ~99.5%

      Pyramidshape14

      ~0.15-0.3;

      ~2.1-2.8

      10-5096.4%
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    Weili Zhang, Xiaoyang Shi, Ruijin Hong, Xingfeng Chen, Cao Feng, Kui Yi. Research Progress in Preparation Technology of Diamond Anti‑Reflection Micro‑Nano Structure[J]. Chinese Journal of Lasers, 2023, 50(8): 0802402

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    Paper Information

    Category: Laser Micro-Nano Manufacturing

    Received: Oct. 17, 2022

    Accepted: Dec. 28, 2022

    Published Online: Mar. 28, 2023

    The Author Email: Zhang Weili (wlzhang@siom.ac.cn)

    DOI:10.3788/CJL221326

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