Research Progress in Preparation Technology of Diamond Anti‑Reflection Micro‑Nano Structure

Weili Zhang; Xiaoyang Shi; Ruijin Hong; Xingfeng Chen; Cao Feng; Kui Yi

doi:10.3788/CJL221326

Chinese Journal of Lasers, Volume. 50, Issue 8, 0802402(2023)

Research Progress in Preparation Technology of Diamond Anti‑Reflection Micro‑Nano Structure

Weili Zhang^1,2、*, Xiaoyang Shi^1,2, Ruijin Hong¹, Xingfeng Chen^1,2, Cao Feng², and Kui Yi²

¹School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China

²Thin Film Optics Laboratory, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

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Weili Zhang, Xiaoyang Shi, Ruijin Hong, Xingfeng Chen, Cao Feng, Kui Yi. Research Progress in Preparation Technology of Diamond Anti‑Reflection Micro‑Nano Structure[J]. Chinese Journal of Lasers, 2023, 50(8): 0802402

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Paper Information

Category: Laser Micro-Nano Manufacturing

Received: Oct. 17, 2022

Accepted: Dec. 28, 2022

Published Online: Mar. 28, 2023

The Author Email: Zhang Weili (wlzhang@siom.ac.cn)

DOI:10.3788/CJL221326

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology