Acta Optica Sinica, Volume. 42, Issue 15, 1524002(2022)

Fabrication of Nanosphere SERS Substrates Based on Mixed Electron Beam Resists

Yixuan Zhou1,2, Jing Yang3, Taoran Xu2, Zhi Qiao2, Da Mu1、*, Peipei Chen2,4、**, and Weiguo Chu2,4、***
Author Affiliations
  • 1School of Electro-Optical Engineering, Changchun University of Science and Technology, Changchun 130022, Jilin , China
  • 2Nanofabrication Laboratory, CAS Key Laboratory for Nanophotonic Materials and Devices, CAS Excellent Center for Nanoscience, National Center for Nanoscience and Technology, Beijing 100190, China
  • 3State Environmental Protection Key Laboratory of Quality Control in Environmental Monitoring, China National Environmental Monitoring Centre, Beijing 100012, China
  • 4Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
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    Yixuan Zhou, Jing Yang, Taoran Xu, Zhi Qiao, Da Mu, Peipei Chen, Weiguo Chu. Fabrication of Nanosphere SERS Substrates Based on Mixed Electron Beam Resists[J]. Acta Optica Sinica, 2022, 42(15): 1524002

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    Paper Information

    Category: Optics at Surfaces

    Received: Jan. 27, 2022

    Accepted: Mar. 7, 2022

    Published Online: Aug. 4, 2022

    The Author Email: Da Mu (muda@cust.edu.cn), Peipei Chen (chenpp@nanoctr.cn), Weiguo Chu (wgchu@nanoctr.cn)

    DOI:10.3788/AOS202242.1524002

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