Laser & Optoelectronics Progress, Volume. 60, Issue 5, 0514004(2023)

Analysis of Dislocation Formation and Expansion Characteristics in Vertical Cavity Surface Emitting Lasers

Yuqi Zhang1,2, Zhiyuan Zuo1, and Jia Zhao1、*
Author Affiliations
  • 1School of Information Science and Engineering, Key Laboratory of Laser & Infrared System, Shandong University, Qingdao 266237, Shandong, China
  • 2Xiamen Sanan Integrated Circuit Co., Ltd., Xiamen 361000, Fujian, China
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    Figures & Tables(15)
    Schematic diagrams of dislocation glide and climb motion[5]. (a) Glide; (b) climb
    Structure of the oxide VCSEL[2]
    Cross-section TEM image of the VCSEL from oxide tip[23]
    Cross-section TEM image of oxide VCSEL damaged by ESD[28]
    Schematic diagram of VCSEL corrosion failure mechanism[31]
    VCSEL failure due to mesa oxide edges. (a) Dislocation image of a failed VCSEL[32]; (b) plane-view TEM image of dislocation[33]
    Two-step degradation mode of the VCSEL[18]
    Schematic diagram of internal stress field in crystal[36]
    Schematic diagram of kink formed during dislocation glide process[37]
    Schematic diagram of the dislocation glide motion [18]
    Schematic diagram of the dislocation shape[39]
    Temperature dependence of α dislocation rate in gallium arsenide[5]
    Cross-section TEM of failed VCSEL[41]
    Process for recombination-enhanced dislocation climb leading to the formation of a dislocation dipole[18]. (a) Initial screw dislocation; (b) dislocation after climbing
    Growth shapes of various expansion modes[34]
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    Yuqi Zhang, Zhiyuan Zuo, Jia Zhao. Analysis of Dislocation Formation and Expansion Characteristics in Vertical Cavity Surface Emitting Lasers[J]. Laser & Optoelectronics Progress, 2023, 60(5): 0514004

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Dec. 7, 2021

    Accepted: Jan. 18, 2022

    Published Online: Mar. 3, 2023

    The Author Email: Jia Zhao (zhaojia@sdu.edu.cn)

    DOI:10.3788/LOP213162

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