Microelectronics, Volume. 52, Issue 3, 432(2022)
Study on Homogenization Model Parameters Determination Method of Microsystem Structure
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LI Kui, WANG Xin, LI Ruotian, KUANG Nailiang, QIU Yuanying, LI Jing. Study on Homogenization Model Parameters Determination Method of Microsystem Structure[J]. Microelectronics, 2022, 52(3): 432
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Received: Oct. 31, 2021
Accepted: --
Published Online: Jan. 18, 2023
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