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Microelectronics, Volume. 52, Issue 3, 432(2022)

Study on Homogenization Model Parameters Determination Method of Microsystem Structure

LI Kui1, WANG Xin2, LI Ruotian2, KUANG Nailiang1, QIU Yuanying2, and LI Jing2
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    LI Kui, WANG Xin, LI Ruotian, KUANG Nailiang, QIU Yuanying, LI Jing. Study on Homogenization Model Parameters Determination Method of Microsystem Structure[J]. Microelectronics, 2022, 52(3): 432

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    Received: Oct. 31, 2021

    Accepted: --

    Published Online: Jan. 18, 2023

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.210414

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology