Laser & Optoelectronics Progress, Volume. 57, Issue 3, 031201(2020)

Defect Detection in Mirror-Like Object Surface Based on Phase Deflection

Shuo Jiang, Linghui Yang, Yongjie Ren, and Jigui Zhu*
Author Affiliations
  • State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China
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    Shuo Jiang, Linghui Yang, Yongjie Ren, Jigui Zhu. Defect Detection in Mirror-Like Object Surface Based on Phase Deflection[J]. Laser & Optoelectronics Progress, 2020, 57(3): 031201

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jun. 3, 2019

    Accepted: Jul. 26, 2019

    Published Online: Feb. 17, 2020

    The Author Email: Jigui Zhu (jiguizhu_tju@163.com)

    DOI:10.3788/LOP57.031201

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