Chinese Journal of Lasers, Volume. 49, Issue 10, 1002702(2022)

Fabrication of Bioinspired Functional Micro-Nano Structures by Femtosecond Laser and Their Applications

Jiaji Cao, Siyu Xiu, Jinkai Xu*, and Huadong Yu**
Author Affiliations
  • Ministry of Education Key Laboratory for Cross-Scale Micro and Nano Manufacturing, School of Mechanical and Electrical Engineering, Changchun University of Science and Technology, Changchun 130022, Jilin, China
  • show less
    Figures & Tables(15)
    Schematics of femtosecond laser direct writing platform. (a) Galvanometer processing platform; (b) 3D piezoelectric ceramic displacement processing platform
    Micronano structures prepared by LIPSS on surfaces of different materials. (a) SOI surface grating and its structural color[46]; (b) micro-nanostructure prepared on surface of 316L stainless steel and its structural color[47]; (c) LIPISSs in different directions[48]; (d) LIPISSs with polarization dependence and its structural color[49]
    Adjustable structure colors prepared on stainless steel (X2CrNiMo17-12-2) and polymer surfaces[50]. (a) Structural colors produced by LIPSS on surface of stainless steel under different observation angles with white light illumination; (b) change of structural color from green to yellow when stainless steel is stretched in different degrees; (c) change of structural color when polymer is stretched in different degrees
    Structural colors of LIPSS formed at different processing wavelengths and viewing angles [51]
    Superhydrophobic structures on different material surfaces. (a) Large-area superhydrophobic surface[56]; (b) lotus leaf like superhydrophobic microboat[57]; (c) compound eye inspired multifunctional integration glass[58]; (d) ice resistance of superhydrophobic structure on PTFE[59]
    Superhydrophobic structures based on polymer with shape memory property of thermal response[61]. (a) Physical diagrams of SMP film in initial state and deformation state and after restoration, and SEM images of reversible morphological transformation between original and deformed micro-column arrays; (b) schematic and physical diagrams of liquid transportation in different tracks on surface of SMP micro-column array and self-cleaning effect
    Antireflective structures induced by femtosecond lasers on silicon surface[66]. (a) SEM image of periodic surface structure induced by femtosecond laser on silicon wafer and different colors when observing silicon wafer at different viewing angles; (b) antireflection test results of total reflection and specular reflection of polarized light at 6° incident angle by structure prepared by FLIPSSs
    Antireflection structures induced by femtosecond laser on fused quartz surface[67]. (a) Optical photo and SEM image of insect wing and its surface microstructure; (b) optical photo and SEM image of treated fused quartz sheet and its surface microstructure; (c) photo of treated antireflection fused quartz sheet; (d) test results of reflectance of unstructured and single-sided antireflection structure and double-sided antireflection structure from light band to mid infrared light band
    Antireflection structures induced by femtosecond laser on 304 stainless steel surfaces[68]. (a) SEM images of femtosecond laser-induced icrostructures under different polarization and energy densities; (b) specular reflection characteristics of prepared samples; (c) reflection characteristics of prepared samples in circle band in Fig. 9 (b)
    Subwavelength microstructures fabricated on ZnS by parallel femtosecond laser beams[69]. (a) Schematic of experimental setup for femtosecond laser parallel processing of subwavelength microstructures; (b) physical diagram of prepared sample; (c) 5×5 light field intensity distribution of focused diffraction pattern; (d) transmission spectra of single-sided structure at different incident angles; (e) transmission spectra of double-sided structure at different incident angles
    Antireflection structures on nickel surface prepared by ethanol assisted femtosecond laser irradiation[70]. (a) Schematic of experimental setup for one-step assembly of 3D micro-nano cage structure under ethanol assisted femtosecond laser irradiation, irregular microstructure induced by laser in air, laser induced spherical microstructure in distilled water, and 3D micro-nano cage structure induced in ethanol solvent; (b) reflectivity test and physical diagrams of 3D micro-nano cage structures prepared by laser irradiation of nickel surface with different pulse energies
    Fabrication of bioinspired compound eye based on PMMA by femtosecond laser direct writing and thermo-mechanical bending[78]. (a) Flow chart of preparation of PMMA-based bioinspired compound eye; (b) SEM image of morphology of PMMA-based bioinspired compound eye; (c) optical microscope diagram of imaging of PMMA-based bioinspired compound eye; (d) field angle of PMMA-based bioinspired compound eye
    PDMS based bioinspired compound eye prepared by wet etching assisted femtosecond laser direct writing and lithography[79]. (a) Flow chart of preparation of PDMS-based bioinspired compound eye; (b) schematic of femtosecond laser direct writing micro-dot array on inclined glass sheet and analysis results of micro-lens deformation; (c) test results of morphology of PDMS-based bioinspired compound eye; (d) optical test results of PDMS-based bioinspired compound eye
    Bioinspired compound eye fabricated by dry etching assisted femtosecond laser direct writing and high-temperature casting of superhard materials[81]. (a) Flow chart of preparation of glass-based bioinspired compound eye and morphology of bioinspired compound eye; (b) imaging and focusing diagrams of glass-based bioinspired compound eye; (c) field angle of glass-based bioinspired compound eye
    Zoom imaging bioinspired compound eye fabricated by wet etching assisted femtosecond laser direct writing and lithography[82]. (a) Principle diagrams of design inspiration, preparation process, and zoom imaging of bioinspired compound eye; (b) test diagrams of zoom imaging of bioinspired compound eye
    Tools

    Get Citation

    Copy Citation Text

    Jiaji Cao, Siyu Xiu, Jinkai Xu, Huadong Yu. Fabrication of Bioinspired Functional Micro-Nano Structures by Femtosecond Laser and Their Applications[J]. Chinese Journal of Lasers, 2022, 49(10): 1002702

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: Nov. 30, 2021

    Accepted: Jan. 14, 2022

    Published Online: May. 9, 2022

    The Author Email: Xu Jinkai (xujinkai@cust.edu.cn), Yu Huadong (yuhd@cust.edu.cn)

    DOI:10.3788/CJL202249.1002702

    Topics