Optics and Precision Engineering, Volume. 17, Issue 8, 1878(2009)

Design of four-arm MEMS microgripper integrated with force sensor

SUN Li-ning1、*, CHEN Tao1, SHAO Bing1, and LI Xin-xin2
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    SUN Li-ning, CHEN Tao, SHAO Bing, LI Xin-xin. Design of four-arm MEMS microgripper integrated with force sensor[J]. Optics and Precision Engineering, 2009, 17(8): 1878

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    Paper Information

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    Received: Aug. 28, 2008

    Accepted: --

    Published Online: Oct. 28, 2009

    The Author Email: SUN Li-ning (lnsun@hit.edu.cn)

    DOI:

    CSTR:32186.14.

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