Alignment methods for micron-scale surface defects automatic evaluation of large-aperture fine optics

Pin Cao; Yongying Yang; Chen Li; Huiting Chai; Yang Li; Shibin Xie; Dong Liu

doi:10.3788/COL201513.041102

Chinese Optics Letters, Volume. 13, Issue 4, 041102(2015)

Alignment methods for micron-scale surface defects automatic evaluation of large-aperture fine optics

Pin Cao, Yongying Yang^*, Chen Li, Huiting Chai, Yang Li, Shibin Xie, and Dong Liu

State Key Laboratory of Modern Optical Instrumentation, Department of Optical Engineering, Zhejiang University, Hangzhou 310027, China

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Pin Cao, Yongying Yang, Chen Li, Huiting Chai, Yang Li, Shibin Xie, Dong Liu, "Alignment methods for micron-scale surface defects automatic evaluation of large-aperture fine optics," Chin. Opt. Lett. 13, 041102 (2015)

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Paper Information

Category: Imaging Systems

Received: Nov. 27, 2014

Accepted: Feb. 12, 2015

Published Online: Sep. 21, 2018

The Author Email: Yongying Yang (chuyyy@zju.edu.cn)

DOI:10.3788/COL201513.041102

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology